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Thick film force sensitive slurry

A thick film and paste technology, applied in the fields of measuring force, conductive coatings, inorganic chemistry, etc., can solve the problem that it cannot meet the needs of research and industrialization of thick film force sensors

Inactive Publication Date: 2008-07-16
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This situation can no longer meet the needs of research and industrialization of thick-film force-sensitive sensors

Method used

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  • Thick film force sensitive slurry
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Experimental program
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Embodiment Construction

[0020] 1. RuO 2 Preparation of Nanopowder

[0021] Weigh hydrated ruthenium oxide (RuO 2 ·H 2 O) Put it into a nickel boat, then place it in a high-temperature furnace to slowly raise the temperature, keep it in the range of 400-600°C for 50-65 minutes, and then discharge the material after cooling to get 7-20nm RuO 2 Nano powder.

[0022] 2. Conductive phase 2 Ru 2 o 7 preparation of

[0023] Weigh RuO at a molar ratio of 2:1 2 and Bi 2 o 3 Put it into a mortar and mix it, then use a star-type ball mill to grind it for 3-4 hours, and finally pour it into a high-temperature furnace built in a quartz boat, slowly raise the temperature, and perform a solid-state reaction at 650-800°C for 50-60 minutes.

[0024] 3. Preparation of glass phase lead borosilicate

[0025] Take Pb 3 o 4 、H 3 BO 4 , SiO 2 , MnCO 3 , weighed successively by 65%, 14%, 18-19%, 1-3% (percentage by weight), put into a mortar and mix, and ball mill for 1-2 hours with a planetary ball mill. ...

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Abstract

The invention relates to thick-film force-sensitive slurry which is made by adding organic into the mixture of ruthenate bismuth in 60-80% and the lead borate silicate in 20-40%. Wherein, the ruthenate bismuth is made by the reaction between the ruthenium oxide nanometer powder and the bismuth oxide in the temperature of 650-800Deg. C; the ruthenium oxide nanometer powder is made by dehydrating the hydration ruthenium oxide in 400-600Deg. C. The inventive slurry can be plated on the ceramic basic plate to be sintered in high temperature to prepare the thick-film force sensor with high gage factor. The gage factor GF is 13-17 and the temperature factor TCR <= + / -100ppm / Deg. C. The invention can resist corrosion and high temperature with wider working temperature and less creep deformation without plastic deformation after working long time. The flexible can direct contact the corrosive acid and alkali gas (liquid). And it has wider application in the industry automatic control and dynamoelectric integration.

Description

1. Technical field [0001] The present invention relates to a slurry used for a strain-type force-sensitive sensor, in particular to a slurry used for processing the strain resistance of a force-sensitive sensor, to be precise a slurry used for a low-cost, high-gauge coefficient thick-film force-sensitive sensor and its preparation method. 2. Background technology [0002] In recent years, sensor technology as a signal detection and information acquisition has been paid more and more attention at home and abroad, and has become one of the most rapidly developing disciplines in electronic information technology. Among them, the force-sensitive sensor involves the perception, testing and conversion of various physical quantity information such as force, pressure, acceleration and liquid level, and is the most widely used sensor variety with the largest demand and sales. [0003] At present, force sensitive sensors at home and abroad have always been dominated by resistance str...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/84H01L49/02G01L1/22C01G55/00C01G29/00C01G21/00C09D5/24H10N97/00
Inventor 马以武常慧敏李民强陈建群
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI