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A photo-modulated reflectance spectrum measuring method and an apparatus based on step scanning

A technology of step-scanning and reflectance spectroscopy, which is applied in color/spectral characteristic measurement, optics, nonlinear optics, etc., can solve problems such as difficulty in realizing PR spectrum measurement, inability to separate modulation frequencies, etc., and shorten the required time and experiment Shorter time and higher detection sensitivity

Active Publication Date: 2009-03-04
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, for existing choppers, this is an insurmountable obstacle
The fast scanning mode of the FTIR spectrometer itself cannot completely separate the Fourier transform frequency from the modulation frequency of the pump laser, which leads to the difficulty of realizing PR spectrum measurement in the fast scanning mode of the FTIR spectrometer.

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  • A photo-modulated reflectance spectrum measuring method and an apparatus based on step scanning
  • A photo-modulated reflectance spectrum measuring method and an apparatus based on step scanning
  • A photo-modulated reflectance spectrum measuring method and an apparatus based on step scanning

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Embodiment Construction

[0023] The following is based on Figure 1-Figure 3 The preferred embodiments of the present invention are given and described in detail to better illustrate the technical features and functional characteristics of the present invention, rather than to limit the scope of the present invention.

[0024] From figure 1 It can be seen that the light-modulated reflectance spectrum measurement device that implements the step-scan involved in the present invention is constituted, the lock-in amplifier 21 in the light-modulated device 2 is connected between the spectrometer 10, the reflective sample holder 4 and the computer 20, and the laser 3 emits A chopper 22 is arranged on the path of the pump laser beam incident on the sample 5 to form a modulated incident laser light. More specifically, the step-scan light-modulated reflectance spectroscopy measuring device of the present invention includes a laser 3, which generates Continuous pump laser;-Fourier transform infrared spectrosco...

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Abstract

The invention relates to a method and apparatus of photo-modulation reflection spectroscopy based on step scan. The apparatus comprises a Fourier transform infrared spectrograph measuring system, a laser used as pump light source, a lock-in amplifier and a low-pass filter which connect the Fourier transform infrared spectrograph detector and the circuit controlling plate, wherein the circuit-breaker on the light path between the sample and the laser can transfer the constant pump laser into the modulated laser and feedback it in the reference end of the lock-in amplifier to control the lock-in.

Description

technical field [0001] The present invention relates to a method and device for testing weak light characteristics of middle and far infrared optoelectronic materials, specifically, it is mainly based on the step-scan function of Fourier Transform Infrared (FTIR) spectrometer to measure the optical modulation reflection spectrum of optoelectronic materials and device. Background technique [0002] Photomodulated reflectance (PR) spectroscopy, as an effective means of non-contact detection of semiconductor materials, is widely used in the study of the microstructure of semiconductor materials and the optical properties of devices. The traditional PR spectrum test system consists of pump laser, probe light (broadband light source), monochromator and phase-sensitive detection system. The sample is periodically perturbed by modulating the pump laser, so that the built-in electric field produces small changes of the same period, and finally the corresponding information is obtai...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/27G06F17/14G02F1/00
Inventor 邵军陆卫吕翔越方禹李志锋郭少令褚君浩
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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