Ceramic welding mold for welding and packaging semiconductor chip and lead-out wire
A ceramic welding and lead-out technology, which is applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, welding equipment, etc., can solve the problems of scrapping, glass bulb damage, glass bulb and mold bonding, etc., to maintain the yield rate, high Yield rate, effect of eliminating chipping phenomenon
Inactive Publication Date: 2009-03-11
许行彪
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- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, in actual use, it is found that the glass bulb packaging with higher temperature requirements, such as 600-950°C, will still cause the glass bulb and the mold to bond to each other, and the glass bulb will be damaged and scrapped when it is removed.
Method used
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Experimental program
Comparison scheme
Effect test
Embodiment 1
[0013] Embodiment 1: metal silicon powder or 100% Sialon, plus 0.8-4% binder, molding, after sintering in a nitriding atmosphere, spray or brush boron nitride powder on the surface.
Embodiment 2
[0014] Embodiment 2: metal silicon powder or Sialon 55%, boron nitride powder 40%, aluminum nitride 5%, plus 0.8-4% binder, molding, sintering in a nitriding atmosphere.
Embodiment 3
[0015] Embodiment 3: metal silicon powder or Sialon 65%, boron nitride powder 30%, aluminum nitride 5%, plus 0.8-4% binder, molding, sintering in a nitriding atmosphere.
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The invention relates to an improvement on the welding and packing ceramic mould between semi-conductor and lead-out wire, wherein it is characterized in that: it coats boron nitride on the surface of shaped / sintered silicon or silicon nitride at 51-100wt%, and the boron nitride at 0-49wt%. And the obtained welding module can be used in 600-950Deg. C high-temperature welding and packing. And the product will not deform in long time at high temperature, and the glass package will not adhere with glass.
Description
technical field [0001] The present invention is a follow-up improvement application to the Chinese patent 200410071751.9 previously applied by the applicant, and especially relates to a ceramic welding mold with a long service life, which is especially suitable for glass bulb packaging. Background technique [0002] In the Chinese patent 200410071751.9, the applicant discloses a semiconductor device in the electronics industry such as diodes, triodes, bridge stacks, etc., a chip and lead wire welding, and a packaging mold. Progress, for welding and plastic packaging with a temperature requirement of 300-500 ° C, it has a good use effect, greatly prolongs the service life, and greatly improves the welding yield. However, in actual use, it is found that the glass bulb packaging with higher temperature requirements, such as 600-950°C, will still cause the glass bulb and the mold to bond to each other, and the glass bulb will be damaged and scrapped when it is removed. So there...
Claims
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IPC IPC(8): H01L21/56H01L21/60H01L21/50C04B35/52C03B23/20B23K31/00
CPCH01L2924/0002Y02P40/57
Inventor 许行彪
Owner 许行彪