Reusable parameter module model building method for space continuous deformation MEMS

A modeling method, parametric technology, applied in chemical instruments and methods, electrical components, electrical digital data processing, etc.
CN100498803CInactive Publication Date: 2009-06-10NORTHWESTERN POLYTECHNICAL UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NORTHWESTERN POLYTECHNICAL UNIV
Publication Date
2009-06-10
Estimated Expiration
Not applicable · inactive patent

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Abstract

A modeling method of reusable parameterized component for space continuous deformation MEMS includes confirming each dynamic control equation and boundary condition equation of MEMS device, carrying out space discretization on dynamic control equation and converting said control equation to be constant-differential equation set, utilizing hardware description language of analog and mixed signal to carry out coding for realizing function description, plotting schematic diagram of MEMS device and connecting said diagram with code to form MEMS device being called in system modeling and in simulation analysis.
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Description

technical field

[0001] The invention relates to a method for establishing a model of a micro-electro-mechanical system (MEMS) device, belonging to the field of computer-aided design (MEMS CAD) of a micro-electro-mechanical system. Background technique

[0002] With the improvement of integration, the demand for MEMS system-level design will become more and more urgent. System-level design focuses on modeling and performance simulation of the entire microsystem (including mechanical structures, circuits, and multi-domain coupling components, etc.). Due to the difficulty and complexity of related work, how to establish a model that can accurately express device behavior and realize reusable parametric component models has become a key issue, which is crucial for the development of MEMS CAD technology and the improvement of MEMS design efficiency and R&D level.

[0003] Among the existing MEMS system-level modeling methods, the nodal analysis method can establish a parameteriz...

Claims

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