Piezoelectric ceramic driving power based on voltage and current composite control

Abstract

The invention relates to a piezoelectric ceramic drive power supply based on compound control of voltage and current. It includes a piezoelectric ceramic Z, a high-voltage operational amplifier A1 connected to both ends of the piezoelectric ceramic, and a composite control circuit of the inner and outer loops. A2, resistor R2, adjustable resistor R4 connected in parallel between R2 and the output terminal of A1, and adjustable capacitor C1 form a proportional-integral controller to realize the voltage feedback of the outer loop. Test the piezoelectric ceramic drive power supply, apply a control voltage to charge the piezoelectric ceramic for a period of time, and detect the displacement of the piezoelectric ceramic with a fixed cycle. The maximum bandwidth of the piezoelectric ceramic based on composite control is measured when the range is 0-10μm. 2.5kHz, the minimum stable frequency is 0.1Hz. The minimum stabilization time of the open-loop step ring is less than 1ms, and the minimum positioning error is less than 4nm.

Description

(1) Technical field [0001] The invention relates to a driving power supply, in particular to a piezoelectric ceramic driving power supply. (two), background technology [0002] With the development of science and technology and the continuous expansion of people's research fields, the operating objects have gone deep from the macroscopic field to the microscopic field. The piezoelectric ceramic micro-displacement device has the characteristics of small size, high displacement resolution, high frequency response, no noise, no heat, etc., and is an ideal micro-displacement element. In order to complete operations such as optical precision engineering, microsurgery, ultra-precision machining and precision measurement, the system needs to achieve nanometer-level positioning accuracy, and the requirements for system dynamic performance are getting higher and higher. With the increasingly wide application of piezoelectric ceramic drivers, more and more attention has been paid to ...

AI Technical Summary

Problems solved by technology

Among them, the voltage-controlled drive power supply is the mainstream product in the market at present, but under the voltage feedback control mode, piezoelectric ceramics have hysteresis and creep under open-loop control conditions. In some occasions that require open-loop control, piezoelectric ceramics The positioning accuracy of the ceramic driver is significantly reduced; at present, closed-loop control is usually used for precision positioning control, but due to the addition of sensors, it not only increases the cost, but also easily causes oscillation, which affects the dynamic characteristics; Higher and higher, more attention is paid to the dynamic frequency response of the piezoceramic power supply

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