Double quality oscillatory type silicon micro-gyroscopes

A silicon micro-gyroscope, vibrating technology, used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve problems such as poor angular vibration linearity, limited sensitivity, etc., to release thermal stress and increase flexibility the effect of reducing the error signal

Active Publication Date: 2010-01-27
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The dual-mass design of the gyroscope can increase the output signal, but its drive is fully coupled with the sensitive motion, and the linearity of angular vibration is poor, which limits the improvement of its sensitivity

Method used

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  • Double quality oscillatory type silicon micro-gyroscopes
  • Double quality oscillatory type silicon micro-gyroscopes
  • Double quality oscillatory type silicon micro-gyroscopes

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0012] combine figure 1 , the double-mass vibrating silicon micro-gyroscope of the present invention is used to measure a measuring instrument perpendicular to the level of the base, and consists of upper and lower layers. Signal leads on the glass substrate, the upper mechanical structure of the gyroscope is composed of a pair of identical substructures 100, 200, which are arranged symmetrically on the left and right, and are respectively connected to the beams 3a, 3b, the beam 3a , 3b are connected to the fixed base 1a, 1b through two groups of torsion bars 2a, 2b, 2c, 2d, and the structure of the resonator 120a of the gyroscope is as attached figure 2 As shown, the resonator 210a is composed of three sets of linear comb-like capacitors. Among them, the middle group is the drive feedback comb, which is composed of the fixed drive feedback comb 104a and the movable comb on the horizontal plate 107a. The other two groups are driving combs, which are composed of fixed drivin...

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Abstract

The invention comprises an upper layer and a lower layer. On the upper layer there is a gyroscope mechanical structure made on a monocrystalline silicon plate; on the lower layer there are signal leads made on the glass substrate. The gyroscope mechanical structure is composed of two identical substructures; said two substructures are set in bilateral symmetry and respectively connected to the cross beam; the cross beam is connected to the fixed base through two groups of twisted bars; said fixed base is mounted on the linkage point o the fixed base on the glass substrate in order to make the mechanical structure part on the upper layer hang above the glass substrate.

Description

technical field [0001] The invention belongs to micro-electromechanical system and micro-inertia measurement technology, in particular to a double-mass vibrating silicon micro-gyroscope. Background technique [0002] Micromachined inertial instruments include micromachined gyroscopes (MMG) and micromachined accelerometers (MMA). The use of microelectronic processing technology allows the complete integration of micromechanical structures and required electronic circuits on a silicon chip, thereby achieving a high degree of unity in terms of performance, price, volume, weight, and reliability. Therefore, this type of instrument has a series of advantages (such as small size, light weight, cheap price, high reliability, mass production, etc.), and has broad application prospects in both military and civilian fields. In civilian use, it is mainly used in the automotive industry, industrial monitoring and consumer products and robotics, such as airbags, anti-lock braking system...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56B81B7/02G01P9/04G01P15/097G01C21/18G01C19/5656
Inventor 裘安萍施芹苏岩朱欣华
Owner NANJING UNIV OF SCI & TECH
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