Double quality oscillatory type silicon micro-gyroscopes
A silicon micro-gyroscope, vibrating technology, used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve problems such as poor angular vibration linearity, limited sensitivity, etc., to release thermal stress and increase flexibility the effect of reducing the error signal
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[0012] combine figure 1 , the double-mass vibrating silicon micro-gyroscope of the present invention is used to measure a measuring instrument perpendicular to the level of the base, and consists of upper and lower layers. Signal leads on the glass substrate, the upper mechanical structure of the gyroscope is composed of a pair of identical substructures 100, 200, which are arranged symmetrically on the left and right, and are respectively connected to the beams 3a, 3b, the beam 3a , 3b are connected to the fixed base 1a, 1b through two groups of torsion bars 2a, 2b, 2c, 2d, and the structure of the resonator 120a of the gyroscope is as attached figure 2 As shown, the resonator 210a is composed of three sets of linear comb-like capacitors. Among them, the middle group is the drive feedback comb, which is composed of the fixed drive feedback comb 104a and the movable comb on the horizontal plate 107a. The other two groups are driving combs, which are composed of fixed drivin...
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