Method and apparatus for processing transparent conductive glass surface by dry ice particle spraying technique

A technology of transparent conductive glass and technical treatment, which is applied in the field of polishing and cleaning of transparent conductive glass to achieve the effects of reducing discharge, saving water and reducing pollution

Inactive Publication Date: 2007-08-08
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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  • Method and apparatus for processing transparent conductive glass surface by dry ice particle spraying technique

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Embodiment Construction

[0019] In the present invention, the pressure of the high-pressure carbon dioxide gas is greater than 6 MPa, the inner diameter of the nozzle 5 is less than 0.7 mm, and the diameter of the generated dry ice particles is less than 100 microns. The incident angle between the dry ice particle jet and the transparent conductive glass substrate is 30 to 60 degrees, and the jet length of the dry ice particle is 30 to 100 mm.

[0020] The operating steps of the present invention are as follows:

[0021] 1. Place the glass 11 that needs to be polished or cleaned and coated with a transparent conductive film on the Z-direction translation platform 10, with the transparent conductive film facing upwards, and adjust the Z-direction translation platform 10 so that the distance between the surface of the transparent conductive glass and the nozzle 5 meets Processing requirements.

[0022] 2. Adjust the X-direction translation table 8 and the Y-direction translation table 9 so that the noz...

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Abstract

The method of ice particle injection treating transparent electric conductive glass surface uses carbon dioxide ice with radius ranging from several millimeter and 100 millimeter in certain speed, injection angle and distance to spray the transparent glass surface to complete the polishing and cleaning of the transparent electric conductive thin film. It comprises high pressure carbon dioxide gas bottle, air transmission air pipe, gas flow control valve, nozzle connector, nozzle and its angel adjuster, through linkage to connect with the working platform and the gas recovery device. It can improve the surface treatment quality free from water or small quantity of water. It can save water source, reduce the discharge of exhaust water and goods, recover the generated carbon dioxide to reduce contamination to the environment.

Description

technical field [0001] The invention relates to polishing and cleaning material surfaces by using dry ice particle blasting technology, in particular to polishing and cleaning transparent conductive glass. technical background [0002] The polishing methods of transparent conductive glass currently include chemical methods and mechanical polishing methods. Soak transparent conductive glass with KOH (potassium hydroxide) / isopropanol saturated solution for chemical polishing; use fine particle Al for mechanical polishing 2 o 3 The (alumina) powder mechanically grinds the surface of the transparent conductive film of the glass to achieve the purpose of reducing the surface roughness of the transparent conductive film. [0003] At present, the cleaning methods of transparent conductive glass include chemical cleaning method, two-fluid cleaning method, high-pressure jet ultra-fine water cleaning method, hydrogen-containing water cleaning method, megasonic pure water cleaning me...

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Application Information

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IPC IPC(8): B24C1/08
Inventor 李军建
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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