Acoustic surface wave microhydrogen sensor and its production process

A surface acoustic wave and manufacturing process technology, used in the analysis of solids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc., can solve the problem of low sensitivity of hydrogen sensors, and achieve absolute concentration measurement. , enhance the sensitivity, reduce the effect of the impact

Inactive Publication Date: 2008-01-09
NANJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

On the basis of not obviously changing the original process and manufacturing difficulty, the invention effectively improves the sensitivity of the hydrogen sensor

Method used

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  • Acoustic surface wave microhydrogen sensor and its production process

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Effect test

Embodiment 1

[0026] As shown in Figure 1 and Figure 2, the surface acoustic wave micro-hydrogen sensor of the present invention mainly includes: piezoelectric substrate, input interdigital transducer, output interdigital transducer and hydrogen sensitive film, input interdigital transducer and The aluminum interdigital electrode in the output interdigital transducer is attached to the piezoelectric substrate (PZT4), and the hydrogen-sensitive film is composed of a palladium-silver alloy film and a tin dioxide film. The tin dioxide film is attached to the piezoelectric substrate, and the palladium The silver alloy film is attached to the tin dioxide film to form a double-layer sensitive film. The tin dioxide nano film is 50nm thick, the length and width are 200 and 128μm respectively, the palladium-silver alloy film is 20nm thick, and the palladium / silver mass ratio is 75 / 25, the length and width of the interdigital electrodes in the interdigital transducer are 12 and 128 μm, respectively, ...

Embodiment 2

[0038] As shown in Figure 1 and Figure 2, the surface acoustic wave micro-hydrogen sensor of the present invention mainly includes: piezoelectric substrate, input interdigital transducer, output interdigital transducer and hydrogen sensitive film, input interdigital transducer and The aluminum interdigital electrode in the output interdigital transducer is attached to the piezoelectric substrate (PZT4), and the hydrogen-sensitive film is composed of a palladium-silver alloy film and a tin dioxide film. The tin dioxide film is attached to the piezoelectric substrate, and the palladium The silver alloy film is attached to the tin dioxide film to form a double-layer sensitive film. The tin dioxide nano film is 100nm thick, the length and width are 200 and 128μm respectively, the palladium-silver alloy film is 20nm thick, and the palladium / silver mass ratio is 75 / 25, the length and width of the interdigital electrodes in the interdigital transducer are 12 and 128 μm, respectively,...

Embodiment 3

[0050] As shown in Figure 1 and Figure 2, the surface acoustic wave micro-hydrogen sensor of the present invention mainly includes: piezoelectric substrate, input interdigital transducer, output interdigital transducer and hydrogen sensitive film, input interdigital transducer and The aluminum interdigital electrode in the output interdigital transducer is attached to the piezoelectric substrate (PZT4), and the hydrogen-sensitive film is composed of a palladium-silver alloy film and a tin dioxide film. The tin dioxide film is attached to the piezoelectric substrate, and the palladium The silver alloy film is attached to the tin dioxide film to form a double-layer sensitive film. The tin dioxide nano film is 50nm thick, the length and width are 200 and 128μm respectively, the palladium-silver alloy film is 40nm thick, and the palladium / silver mass ratio is 75 / 25, the length and width of the interdigital electrodes in the interdigital transducer are 12 and 128 μm, respectively, ...

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Abstract

The invention discloses a acoustic surface wave tiny hydrogen transducer and its preparation artwork, it mainly uses the field of hydro safety detection technology in the process of hydrogen of production, repertory, transportation and distribution. The transducer not only has the characteristic of monolayer palladium film transducer under the normal temperature, but also improves the sensitivity of hydrogen transducer greatly, at the same time, because of the excellence of using EMES artwork tiny hydrogen transducer which is compactness, response fast, easy integration, good steady, low cost and easy volume production etc. The acoustic surface tiny hydrogen transducer mainly includes: piezoelectricity floor, input forked transducer, output forked transducer and hydrogen agile film which is made up of palladium silver alloys film and cassiterite film, cassiterite film is on the piezoelectricity floor, palladium silver alloys film is on the cassiterite, and it makes two-double sensitive film.

Description

technical field [0001] The present invention relates to a hydrogen sensor and its preparation process, more specifically to a surface acoustic wave micro-hydrogen sensor and its preparation process, which is mainly used for the safety detection of hydrogen in the process of production, storage, transportation and distribution of hydrogen technology field. Background technique [0002] Existing micro-hydrogen sensors are mainly electrochemical. Compared with electrochemical hydrogen sensors, sensors made of SAW technology can work at room temperature, have simple structure, low power consumption, and can obtain high sensitivity and fast temperature without heating. Response time; when working, it is output as a frequency signal, and it can be connected to a computer without an A / D converter, which has unique advantages. It deposits a hydrogen-sensitive thin film on the propagation path of SAW. After absorbing hydrogen, changes in film density, elastic modulus, resistivity, e...

Claims

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Application Information

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IPC IPC(8): G01N29/07G01N29/24
Inventor 殷晨波陶春旻周俊静
Owner NANJING UNIV OF TECH
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