Method for measuring number of fine particles in ultrapure water, filtration device for measuring number of fine particles, method for manufacture thereof and hollow fiber film unit for use in the dev

A measuring method and technology of filtering device, applied in the direction of measuring device, dispersed particle filtration, ultrafiltration, etc., can solve the problems of expensive device, polluted particles, complexity, etc., and achieve the effect of shortening filtration time, improving analysis accuracy, and simplifying filtration time

Active Publication Date: 2008-01-23
NOMURA MICRO SCI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] With the demand for higher water quality of such ultrapure water, the previous method of measuring the number of particles has the following problems: For example, in the case of using a flat membrane as a filter membrane, since the surface of the membrane is exposed, the surface of the flat membrane is exposed due to Blank particles (contamination particles) that do not originate from the ultrapure water to be measured inevitably tend to adhere to the membrane forming process or operation process, etc.
However, since in such a device, a high-speed rotating centrifugal force with a standard rotation speed of 12,000 rpm is generated, the device itself is expensive and complicated

Method used

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  • Method for measuring number of fine particles in ultrapure water, filtration device for measuring number of fine particles, method for manufacture thereof and hollow fiber film unit for use in the dev
  • Method for measuring number of fine particles in ultrapure water, filtration device for measuring number of fine particles, method for manufacture thereof and hollow fiber film unit for use in the dev
  • Method for measuring number of fine particles in ultrapure water, filtration device for measuring number of fine particles, method for manufacture thereof and hollow fiber film unit for use in the dev

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no. 1 Embodiment approach

[0040] Next, a first embodiment of the present invention will be described with reference to Fig. 1 and Fig. 2 . Fig. 1 is a cross-sectional view showing the structure of a filter device for measuring the number of fine particles according to a first embodiment. FIG. 2 is a schematic view showing an example of a method for measuring the number of particles in ultrapure water using the filter device for measuring the number of particles shown in FIG. 1 .

[0041] As shown in Fig. 1, the filter device 1 for measuring the number of particles is manufactured by fixing a hollow fiber membrane 3 with one end closed with an adhesive 2 such as epoxy resin to a pipe joint through the adhesive 2 (resin mold part). 5 and other fixed members, and connect the outer cylinder 6 of the water supply part to one side of the pipe joint 5 (the opening end side of the hollow fiber membrane 3), and connect the outer cylinder 4 (support frame) of the drainage part to the other side (the open end sid...

no. 2 Embodiment approach

[0057] Next, a second embodiment of the present invention will be described.

[0058] The filter device for particle number measurement is a hollow fiber membrane module having a hollow fiber membrane unit, wherein the hollow fiber membrane unit is bonded and fixed in a liquid-tight manner by an adhesive (resin mold part). It is constructed on the disassembled joint (fixed member). Examples of easily detachable joints (fixing members) include commercially available screw joints such as pipe joints, sockets, unions, and sleeves. Depending on the circumstances, it may be a machined product obtained by cutting a round bar or the like to provide an arbitrary screw thread, or a ferrule fitting or the like. The material of the joint (fixing member) depends on the sampling point, and examples thereof include plastics such as stainless steel, polyvinyl chloride resin, polyvinylidene fluoride resin, polyethylene resin, and polypropylene resin. In particular, stainless steel, polyviny...

no. 3 Embodiment approach

[0064] Next, a third embodiment of the present invention will be described with reference to FIG. 4 . Fig. 4 is a cross-sectional view showing the structure of a hollow fiber membrane unit used in a filter device for measuring the number of fine particles according to a third embodiment.

[0065] The hollow fiber membrane unit 201 has a hollow fiber membrane 203 whose both ends are sealed with a sealing resin 202 (adhesive). In addition, the hollow fiber membrane unit 201 is bonded and fixed to a fixing member such as a pipe joint 204 with an adhesive 205 (resin mold part) such as epoxy resin in a state where the closed portions at both ends are exposed. In this way, by sealing both ends of the hollow fiber membrane 203 with the sealing resin 202 or the like in advance, it is possible to keep the inner surface, which is the surface for capturing fine particles, clean until the time of use. In addition, the number of hollow fiber membranes 203 is not particularly limited, and ...

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Abstract

A method for measuring the number of fine particles in ultrapure water includes subjecting the ultrapure water to internal pressure filtration through a hollow fiber membrane having a skin layer capable of trapping the fine particles in the ultrapure water at least on an inner surface thereof, exposing the inner surface of the hollow fiber membrane, and measuring the number of fine particles on the exposed inner surface.

Description

technical field [0001] The present invention relates to a method for measuring the number of particles in ultrapure water for measuring the number of particles contained in the ultrapure water, a filter device for measuring the number of particles, a method for manufacturing the same, and a hollow fiber membrane unit used in the device. Background technique [0002] Conventionally, in ultrapure water manufacturing equipment, etc., in order to confirm whether the required water quality is maintained, for example, laser light scattering, an on-line method using acoustic waves, direct microscopy (for example, refer to non-patent documents 1 and 2) and the like are used to measure Particle count in ultrapure water. [0003] As a method for measuring the number of particles in ultrapure water using a direct microscope method, for example, a method has been proposed (for example, refer to Patent Document 1): a sampling pipe is branched from a pipe that flows through the outlet wat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/10G01N1/02G01N15/00
CPCB01D61/18B01D2313/06B01D63/024G01N33/18G01N2015/1062G01N15/0272G01N1/2035Y10T29/49007G01N2015/1024B01D46/54G01N15/00G01N1/10G01N1/02
Inventor 过藤睦子草野彻赤平一成伊藤隆
Owner NOMURA MICRO SCI CO LTD
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