Semiconductor refrigeration temperature control type ultra- magnetostriction microdisplacement actuator

Abstract

The invention discloses a semiconductor-cooling-and-temperature-control-type giant magnetostrictive micro displacement actuator. The current is used for controlling the drive device to output the displacement and the semiconductor cooler at the both ends of the coil skeleton is used for the temperature control, and moreover a cooling water recycling device is used for provideng heat emission for the heat end of the semiconductor cooler to suppress the temperature increasing of the drive and heat output error to improve the control precision of the displacement output. The actuator of the invention has the advantages of simple structure, relatively small drive current, stable operation and good frequency response. The semiconductor cooling and temperature control technique is adopted to perform rapid cooling and long-time temperature control. The simple structure of the electrical loop, reliable performance and quick response to the temperature change inside the actuator can suppress the heat output error effectively, so the control precision of the displacement output of the actuator can reach the micron grade or higher and can adapt to various poor working conditions. At the sametime, the actuator has the advantages of small volume, light weight, large output force and highly precise displacement, can suppress the influence of the thermal deformation on the output displacement of the drive and can be used in the fields of ultraprecise machining and vibration control.

Description

technical field [0001] The invention relates to a drive device, in particular to a semiconductor refrigeration temperature-controlled giant magnetostrictive micro-displacement actuator. Background technique [0002] Micro-displacement actuators have been widely used in ultra-precision machining, robotics, fluid machinery, vibration control, sonar systems and other fields. At present, the most widely used types are mechanical, hydraulic and piezoelectric. The frequency response of mechanical and hydraulic actuators is low, the output force is small, and the output displacement is difficult to meet the high-precision requirements; although the displacement resolution and frequency response of piezoelectric actuators are relatively high, the output is small, and electrical breakdown is easy to occur , and drift occurs. The giant magnetostrictive micro-displacement actuator has the advantages of large displacement, strong force, fast response, high reliability, and low-voltage...

AI Technical Summary

Problems solved by technology

Due to the closed internal space of the actuator, the heat dissipation performance is poor, especially in the high-frequency and high-current working state, the temperature will rise rapidly, and the thermal error is significant, but the existing technology is too complicated to compensate the thermal error of the actuator, and it is difficult to realize

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