High resistance glass for sealing metal

A metal sealing, high resistance technology, applied in the field of high resistance glass, can solve the problems of good air tightness, poor chemical stability, high insulation resistance, and achieve the effects of low gas leakage rate, high chemical stability, and high insulation resistance

Inactive Publication Date: 2008-05-28
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can solve the disadvantages of low insulation resistance and poor chemical stability of glass used in metal casings, and can be hermetically sealed with Kovar alloy or iron-nickel alloy, with high insulation resistance and good air tightness.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] The manufacturing process of embodiment 1: the mass percent content of each component is: SiO 2 45%, B 2 o 3 15%, Al 2 o 3 10%, CaO10%, BaO15%, ZnO4.5%, Cr 2 o 3 0.5%; Mix the components on a ball mill for 6 hours, mix them evenly, add them into a platinum crucible, melt them in an electric furnace at 1539°C for 4 hours, then cool them rapidly, and pour the melted glass into deionized water to obtain glass Block, ball mill the glass block and granulate it, discharge wax at 740°C, heat up at a rate of 10°C / min, keep warm for 5 minutes in the highest temperature zone, put it into a mold, push it into a micro-oxidizing atmosphere and seal it at 1020°C, the highest temperature zone Keep warm for 20min. After sealing with Kovar alloy and iron-nickel alloy, the insulation resistance of the seal is 5.0×10 12 Ω~5.0×10 13 Ω, air leakage rate≤0.1×10 -10 Pa·m 3 / s.

[0022] Table 1

[0023] Components, performance parameters

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PUM

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Abstract

High resistance glass for metal seal is provided, which pertains to glass field and relates to insulation material applicable to microelectronics packaging and metal seal, in particular to a metal shell or a seal relay. The invention is characterized in that: the glass contains 35-55 percent of SiO2, 5-20 percent of Al2O3, 10-20 percent of B2O3, 5-15 percent of CaO, 10-25 percent of BaO, 3-8 percent of ZnO and 0-2 percent of Cr2O3, the coefficient of linear expansion is ensured to be 45 multiplied by 10<-7>-54 multiplied by 10<-7> / DEG C; the invention can be sealed with kover or iron-nickel alloy and the sealing piece has high insulation resistance and good gas proofness.

Description

technical field [0001] The invention is a kind of high-resistance glass, which is an insulating material that can be hermetically sealed with metal, and is mainly used for metal shells or sealed relays in microelectronic packages. Background technique [0002] Metal casings used in electronic components usually use hollow cylindrical glass insulators, the outside of which is a metal base or side wall, and the inside is a through-type metal lead, which provides electrical connection between the inside and outside of the casing. Among them, glass is the most important material to insulate the shell and the lead wire and realize the vacuum airtight connection, and its quality is directly related to the service life of the components. As the requirements for electronic components are getting higher and higher, the requirements for the performance of glass materials are also getting higher and higher, especially sealing glass with high insulation resistance, high chemical stabili...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C8/24C03C29/00
Inventor 刘燕芳沈卓身
Owner UNIV OF SCI & TECH BEIJING
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