High resistance glass for sealing metal
A metal sealing, high resistance technology, applied in the field of high resistance glass, can solve the problems of good air tightness, poor chemical stability, high insulation resistance, and achieve the effects of low gas leakage rate, high chemical stability, and high insulation resistance
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Embodiment 1
[0021] The manufacturing process of embodiment 1: the mass percent content of each component is: SiO 2 45%, B 2 o 3 15%, Al 2 o 3 10%, CaO10%, BaO15%, ZnO4.5%, Cr 2 o 3 0.5%; Mix the components on a ball mill for 6 hours, mix them evenly, add them into a platinum crucible, melt them in an electric furnace at 1539°C for 4 hours, then cool them rapidly, and pour the melted glass into deionized water to obtain glass Block, ball mill the glass block and granulate it, discharge wax at 740°C, heat up at a rate of 10°C / min, keep warm for 5 minutes in the highest temperature zone, put it into a mold, push it into a micro-oxidizing atmosphere and seal it at 1020°C, the highest temperature zone Keep warm for 20min. After sealing with Kovar alloy and iron-nickel alloy, the insulation resistance of the seal is 5.0×10 12 Ω~5.0×10 13 Ω, air leakage rate≤0.1×10 -10 Pa·m 3 / s.
[0022] Table 1
[0023] Components, performance parameters
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