Coating compositions for photolithography
A technology of composition and organic composition, applied in photosensitive materials, coatings, optics, etc. for optomechanical devices, can solve uneven line width, resolution limit, uneven photoresist line width, etc. question
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Embodiment 1
[0122] The synthesis of embodiment 1 modified polyglutarimide
[0123] Anhydrous potassium carbonate (9.0 g) was added with stirring to 15.3 g of polyglutarimide (Mw 19096, polydispersity index 1.7 and nitrogen content ca. 9%). The mixture was stirred at 21°C for 30 minutes. Tert-butyl bromoacetate (20.0 g) was slowly added to the mixture, followed by heating at 75°C for 18 hours. After cooling, the resulting salt was removed by filtration and washed with a small amount of N,N-dimethylformamide. The combined filtrates were slowly precipitated into 1.0 L of demineralized water acidified with 50 mL of 0.1N hydrochloric acid. The precipitated product was collected on a filter and washed with about 200 mL of demineralized water. After being partially dried on the filter, the polymer was slurried in two 200 mL portions of methanol. The product was partly dried on the filter and further dried under vacuum at 50°C, yielding about 19.8 g of modified polymer. GPC analysis showed ...
Embodiment 2
[0125] Triethylamine (0.05 g) was added under stirring to 15.3 g of polyglutarimide (Mw 19096, polydispersity index 1.7 and nitrogen content ca. 9) dissolved in 155 g N,N-dimethylformamide. %)middle. The mixture was stirred at 21°C for 30 minutes. Di-tert-butyl dicarbonate (22.0 g) was slowly added to the mixture at 25°C, followed by stirring for 18 hours. The solution was slowly precipitated into 1.0 L of demineralized water. The precipitated product was collected on a filter and washed with about 200 mL of demineralized water. After being partially dried on the filter, the polymer was slurried in two 200 mL portions of methanol. The product was partly dried on the filter and further dried under vacuum at 50°C, yielding about 18.4 g of modified polymer.
Embodiment 3
[0127] Anhydrous potassium carbonate (9.0 g) was added with stirring to 15.3 g of polyglutarimide (Mw 19096, polydispersity index 1.7 and nitrogen content ca. 9%). The mixture was stirred at 21°C for 30 minutes. Benzyl bromide (3.4 g) was slowly added to the mixture, followed by stirring at 21°C for 4 hours. Tert-butyl bromoacetate (20.0 g) was slowly added to the mixture, followed by heating at 75°C for 18 hours. After cooling, the resulting salt was removed by filtration and washed with a small amount of N,N-dimethylformamide. The combined filtrates were slowly precipitated into 1.0 L of demineralized water acidified with 50 mL of 0.1 N hydrochloric acid. The precipitated product was collected on a filter and washed with about 200 mL of demineralized water. After being partially dried on the filter, the polymer was slurried in two 200 mL portions of methanol. The product was partially dried on the filter and further dried under vacuum at 50°C, yielding about 20.0 g of m...
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