Inclined deposition plating apparatus

Abstract

An inclined deposition film plating device for plating sculptured thin film in electronic gun evaporation coating machine comprises an installation stand, a sphere crown shaped fixture, a wedge block,a sleeve, a step motor, a step motor driver and a computer, wherein the device is arranged in a vacuum chamber of the coating machine by the installation stand; the wedge block is designed accordingto an inclination angle; the detachable sleeve is used for connecting the step motor and the sphere crown shaped fixture; the step motor is used for controlling the sphere crown shaped fixture to rotate at uniform speed; the step motor is connected with the driver through a cable; the driver is connected with the computer through a cable; and the computer is used for controlling the rotation speedof the fixture through program loaded therein. By initiatively introducing inclination angle of the substrate, the invention can coat a plurality of sculptured thin films with different inclination angles in one step, and has the advantages of simple and compact structure and easy operation.

Description

technical field [0001] The invention relates to coating, in particular to an oblique deposition coating device used for coating sculpture films by an electron gun evaporation coating machine. Background technique [0002] Box-type electron gun evaporation coating machine is a commonly used optical coating equipment. The equipment is mainly composed of three parts: vacuum system, thermal evaporation system, film thickness control system. The coating process is carried out in a vacuum chamber. figure 1 It is the structural diagram of the vacuum chamber of the box-type electron gun evaporation coating machine. The vacuum chamber includes an electron beam evaporation source 1 , a baffle plate 2 , a fixture mounting frame 3 , a baking resistance wire 4 , and a rotating disc 5 for a monitoring film. The electron beam evaporation source 1 is composed of an electron gun and a crucible. The electron flow emitted by the electron gun is accelerated into the crucible to heat the film...

AI Technical Summary

Problems solved by technology

At present, the inclined deposition and coating device used is controlled by two stepping motors. Due to the need for three-dimensional movement, the substrate must be fixed, and only one substrate can be placed at a time. This is different for exploring different preparation processes. The process parameters between experiments are often affected by the stability and repeatability of the equipment, so that the comparability is often not ideal

At the same time, only one substrate can be plated in one vacuuming process, which is a great waste of manpower and material resources. In addition, because the stepping motor in the three-dimensional motion in the vacuum chamber is limited by the temperature of the stepping motor itself (low at 135°C), the deposition process cannot be baked, which greatly limits the scope of the experiment

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