Single-degree-of-freedom ultralow frequency vertical vibration isolation system

Abstract

The invention relates to a vertical vibration isolation system of single freedom and ultra-low frequency, comprising a mass block, a middle mass block, a zero point generator, a zero stiffness apparatus and a stiffness base. The zero stiffness apparatus invents the dynamic stiffness values of the system at a low cost, which greatly decreases the natural frequency of the system and realizes the passive vibration isolation within the range of ultra-low frequency. The zero point generator reduces the vibration transmissibility in the range of the ultra-low frequency and improves the efficiency of vibration isolation; otherwise, the parameters of the zero point generator can be changed to regulate the system vibration transmissibility according to the actual amplitude and frequency requirements of the vibration isolation. The existing relationship between the zero point generator and the zero stiffness apparatus is: the zero stiffness apparatus decreases the dynamic stiffness value and also brings down the zero value of the zero point generator III and realizes zero within the range of ultra-low frequency.

Description

technical field [0001] The invention relates to a mechanical vibration isolation device, in particular to a single-degree-of-freedom ultra-low frequency vertical vibration isolation device. Background technique [0002] In the process of precision manufacturing and precision testing, the vibration of the environment and equipment has a great impact on the processing accuracy and test results, especially in today's rapid development of micro-manufacturing technology, ultra-large-scale integrated chip production, ultra-precision processing, ultra-precision measurement etc., put forward more stringent requirements on the vibration isolation of the equipment. At present, the vibration isolation materials commonly used in engineering mainly include rubber, cork, rigid spring, etc.; commonly used vibration isolation systems include: rubber vibration isolation system, metal spring vibration isolation system, air spring vibration isolation system, etc. The rubber vibration isolatio...

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Problems solved by technology

The rubber vibration isolation system has a certain strength, elasticity and damping. It has a good isolation effect on medium and high frequency vibrations, but it is not ideal for low frequency isolation such as ground pulsation and people walking. The metal spring vibration isolation system itself has fixed stiffness and small damping. The natural frequency of the vibration isolator is high, so it cannot be applied alone to the vibration isolation of the precision instrument table with strict vibration isolation sensitivity; the air spring vibration isolation system is often used in the field of precision engineering, and the system has the characteristics of high load capacity and low stiffness , but the manufacturing cost is high, the ability to adapt to the environment is poor, and devices such as auxiliary air sources and control valves are required, which greatly reduces the versatility and is difficult to be widely used in actual production

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