X-ray tube and X-ray analyzing apparatus

Abstract

To be able to achieve further small-sized formation and light-weighted formation and to promote a sensitivity an X-ray tube and an X-ray analyzing apparatus are disclosed, there are provided a vacuum cabinet (2) inside of which is brought into a vacuum state and which includes a window portion formed by an X-ray transmitting film through which an X-ray can be transmitted, an electron beam source (3) installed at inside of the vacuum cabinet (2) for emitting an electron beam e, a target T generating a primary X-ray X1 by being irradiated with the electron beam e and installed at inside of the vacuum cabinet 2 to be able to emit the primary X-ray X1 to an outside sample S by way of the window portion (1) , and an X-ray detecting element (4) arranged at inside of the vacuum cabinet (2) to beable to detect a fluorescent X-ray and a scattered X-ray X2 emitted from the sample S and incident from the window portion (1) for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray X2.

Description

technical field [0001] The present invention relates to an X-ray tube and an X-ray analysis device, such as a fluorescent X-ray analysis device for an energy dispersive type, more preferably a small-sized and light-weight handy and portable type. Background technique [0002] Fluorescent X-ray analysis is a qualitative analysis of a sample by irradiating a sample with primary X-rays emitted from an X-ray source and detecting fluorescent X-rays emitted from the sample with an X-ray detector to thereby obtain a spectrum from the energy of the fluorescent X-rays or quantitative analysis. Since samples can be analyzed non-destructively and rapidly, fluorescent X-ray analysis is widely used in step-by-step / quality control. [0003] As an analysis method for fluorescent X-ray analysis, there is a wavelength dispersion type that measures the wavelength and intensity of X-rays, and detects with a semiconductor detection element without using a pulse height analyzer to disperse fluo...

AI Technical Summary

Problems solved by technology

[0008] For example, according to the X-ray analysis apparatus described in Patent Reference 1, although a remarkable effect of improving detection sensitivity is achieved by bringing the X-ray tube and the X-ray detector close to the sample, the X-ray tube and the X-ray detector Each has finite and constant or multiple dimensions and is therefore limited in bringing the X-ray tube and X-ray detector close to the sample

[0009] In addition, according to the portable type energy dispersive type fluorescent X-ray analysis device of the related art, although a smaller-sized form and a light-weight form are required, as the structure of the device, the X-ray tube and the X-ray detector occupy most of the volume and mass, so according to this related art, there is a limit in realizing a smaller size form and a light weight form

In addition, the handy type is constituted by an open type in which primary X-rays are directly irradiated to the sample in an environment that does not contain a sample inside a sample chamber in a hermetically sealed state for analysis, and therefore, in view of safety against X-rays, Limits the amount of X-rays generated from the X-ray tube, and therefore must detect fluorescent X-rays from the sample more efficiently

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