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Pneumatic micro-nano imprint demoulding structure

A demoulding and template technology, applied in the direction of nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve problems such as microstructure damage and microstructure deformation

Inactive Publication Date: 2008-08-27
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The automatic demoulding structure has not been redesigned according to the characteristics of micro-nano structure processing, so there is a big problem in actual use, that is, it is easy to cause a large deformation of the micro-structure during separation, so that the imprinted microstructural damage

Method used

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  • Pneumatic micro-nano imprint demoulding structure
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Embodiment Construction

[0015] The present invention will be further described below in conjunction with the drawings and implementation process.

[0016] As shown in Fig. 1a, Fig. 1b, Fig. 2, the structure of the present invention is as follows: polymer clamping cover 7 is housed on the workbench 1 of mold 12 and polymer 2 not yet separated, template 5 is installed on the polymer clamping cover The lower end of 7 faces the mold 12, the upper end of the template 5 is equipped with a piston 9, the sleeve 8 is fixedly connected with the polymer clamping cover 7, and after the sleeve 8 is matched with the piston 9, the sleeve 8 and the piston 9 move up and down, The template 5 can be moved up and down in the polymer clamping cover 7, the lower end of the template 5 is provided with a slideway, the slideway is equipped with a spring 3 and a slider 4, and the mold clamping air channel 6 is connected to the polymer clamping cover 7. After entering, the slider 4 can slide in the slideway on the lower end su...

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Abstract

The invention discloses a nano imprint demoulding structure based on air driving, wherein a polymer clamping casing is arranged on a work bench, a mould plate is arranged at the lower end of the clamping casing, a plunger is arranged on the upper end surface of the mould plate, a sleeve is fixedly connected with the clamping casing, the sleeve and the plunger move from up to down, thereby the mould plate can move from up to down in the clamping casing, a sliding passage arranged on the lower end surface of the mould plate is provided with a spring and a slide block, a mould clamping air passage connected to the clamping casing is led into the slide passage via the mould plate, thereby the slide block can slide in the slide passage on the lower end surface of the mould plate, a demoulding air passage is switched in from the clamping casing and passes through the mould plate, and a sealing ring is arranged on the lower end surface of the clamping casing. The nano imprint demoulding structure is capable of demoulding smoothly, and stress of the polymer and the mould is uniform, further damages of the microstructure imprinted can be reduced to the minimum, the mould can be protested, and the cost of imprinting can be reduced.

Description

technical field [0001] The invention relates to micro-nano processing technology, in particular to a pneumatic-based micro-nano imprint release structure. Background technique [0002] Micro-nano hot pressing molding is a method that can prepare micro-nano structures in large quantities. Its process mainly includes (1) mold preparation, using techniques such as dry etching or wet etching to make molds with micro-nano structures as replicas Matrix; (2) Put the mold and polymer into the imprinting equipment, heat it above the softening temperature of the polymer after vacuuming, apply pressure to transfer the micro-nano structure on the mold to the surface of the polymer, and then hold the pressure for a period of time , and then cooled to fix the microstructure on the polymer, release the pressure and vacuum; (3) separate the polymer and the mold, and then obtain a microstructure complementary to the concave and convex of the mold on the surface of the polymer. The schematic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00
Inventor 贺永傅建中陈子辰
Owner ZHEJIANG UNIV
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