Method for rapidly detecting micro-structure three-dimensional dimension stereoscopic picture

A three-dimensional, three-dimensional image technology, applied in image data processing, measuring devices, instruments, etc., can solve the problems of complex operation process, low detection resolution and accuracy, and influence of detection accuracy, so as to ensure measurement accuracy and simple operation process. , the effect of improving the detection speed

Inactive Publication Date: 2008-08-27
BEIJING UNIV OF TECH
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Problems solved by technology

[0003] At present, a variety of size detection methods have appeared. Scanning electron microscopy and atomic force microscopy are two commonly used microstructure size detection methods. These two types of methods have high detection accuracy, but they are contact measurement methods. The surface is destructive
Moreover, the operation process of these two types of methods is very complicated, and it takes a long time to complete a measurement process, which is not convenient for rapid measurement in the process stage of exploration.
[0004] Interferometry, triangulation

Method used

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  • Method for rapidly detecting micro-structure three-dimensional dimension stereoscopic picture
  • Method for rapidly detecting micro-structure three-dimensional dimension stereoscopic picture
  • Method for rapidly detecting micro-structure three-dimensional dimension stereoscopic picture

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Embodiment Construction

[0053] The present invention is described in further detail now in conjunction with accompanying drawing. figure 1 and figure 2 A flow chart showing the rapid detection method for three-dimensional stereoscopic images of microstructures involved in the present invention, as shown in the figure, the rapid detection method for three-dimensional stereoscopic images of microstructures includes the following steps:

[0054] 1. Preprocess the image

[0055] The left image S11 and the right image S12 are input to the computer, and the color image vector median filter method is used for filtering to obtain filtered color images IAL and IAR. Then use the following method to segment the target and the image background for the color image.

[0056](1) For all pixels in the entire color image IAL(IAR), convert the image IAL(IAR) into a grayscale image IBL(IBR). The conversion method is: the red, green and blue gray values ​​of the pixels in the grayscale image IBL (IBR) are equal, and...

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Abstract

The invention relates to a quick detection method for a microstructure three-dimensional stereo image, in particular to a method of establishing a matching relation through a stereo image pair and calculating the length, width and height of the microstructure through an object image inverse engineering model. The method comprises the following main steps of: preprocessing the images, picking up feature points in the images, matching the features, carrying out the optimization and error correction for matching results, carrying out the object image inverse engineering and outputting sizes of the three dimensions. The method which belongs to the non-contact type measurement without damaging the surface of a sample can ensure the measurement precision of the system. Simultaneously the method improves the detection speed through generating a stereo surface, thereby bringing about a simpler and quicker operating flow. The method is a computer-aided measuring method with high efficiency.

Description

technical field [0001] The invention relates to a method for detecting a three-dimensional stereoscopic image of a microstructure, in particular to a method for establishing a matching relationship by using a stereoscopic image pair, and calculating the length, width and height of a microstructure through an object image inverse model. Background technique [0002] Three-dimensional size detection of microstructure is an important direction in MEMS. The scale of the microstructure ranges from a few microns to tens of microns, and its volume is very small. Estimating its three-dimensional size is necessary in the processing and production of microstructures. Microstructure is a relatively large range, which can be micro-devices, such as channels, bosses, etc., or a combined system composed of multiple micro-devices. The microstructure generally needs to go through multiple processes to complete. Affected by external factors such as processing conditions, it is often necessar...

Claims

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Application Information

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IPC IPC(8): G01B11/02G06K9/46G06K9/64G06T17/00
Inventor 王跃宗
Owner BEIJING UNIV OF TECH
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