Method for producing structure
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- FUJITSU LTD
- Publication Date
- 2008-09-17
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The present invention relates to methods for fabricating structures made of photoreactive or photocurable resins. This photoreactive resin (photosensitive resin) is generally called a resist and is developed. The photocurable resin is used in stereolithography technology. What these resins have in common is that light is used to achieve at least a photoreaction. Unless otherwise specified, these resins are referred to as "photoreactive resins" in this specification. Background technique
[0002] Demand for microstructures such as bio-elements and optical devices composed of photoreactive resins is increasing today. The application of photolithography (exposure) in which a mask pattern is transferred to a resin and nanoimprint technology in which a mold pattern is transferred has been conceived for making microstructures. However, photolithography is a technique in which, after exposure, a pattern is transferred to a substrate under a photoreactive ...