Robustness tuning fork vibrating type micromechanical gyroscope

Abstract

A haleness type tuning fork vibration type microcomputer top, includes a first baseplate and two groups of symmetrical bar shape fixing electrodes for measurement, four anchor points fixed on the first baseplate, a second baseplate suspended above the first baseplate. the second baseplate includes a left structure and a right structure and a middle structure connected therebetween, wherein the left structure includes a detection quality block vibrating along the detection direction (the y direction), four detection elastic beams between the detection quality block and the driving quality block, a driving quality block vibrating along the driving direction (the X direction) vertical to the detection direction and four driving elastic beams connected with the driving quality block. The middle structure includes two coupled quality block sconnected with the driving elastic blocks, a middle coupled elastic beams connected with the middle coupled quality block. The top has no need to be packed in the vacuum with higher sensitivity and bandwidth, better capacity of resisting disturbance, which is not sensitive to the environment and the machine error with better haleness.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical systems, and relates to a robust tuning fork vibrating micro-mechanical gyroscope, in particular to a tuning-fork vibrating micro-mechanical gyroscope whose left and right structures are indirectly connected, driven and detected by synovial film damping. Background technique [0002] The micromechanical gyroscope is a micro inertial sensor that uses the Coriolis effect to detect the angular velocity of a rotating object. Micromechanical gyroscopes prepared by microelectronic machining technology are widely used in aerospace, military, automotive, and consumer electronics products due to their low cost, small size, light weight, low power consumption, simple structure and process, and suitable for mass production. and other fields. The original micromechanical gyroscope was proposed in 1993, with only one mass block and one elastic beam. With the development of silicon micromachining techn...

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Problems solved by technology

[0003] For micromechanical gyroscopes, no matter whether the drive method is electrostatic drive or electromagnetic drive, the detection method is piezoresistive detection or capacitive detection, or the package is vacuum package or atmospheric pressure package, the goal is to improve the performance of the device. However, Most of the current micro-mechanical gyroscope products have low precision and are sensitive to environmental interference and processing errors. They are mainly used in the low-end and middle-end fields that do not require high precision. In the field, the idea of ​​product robust design is introduced. In the design stage, a reasonable structure is designed so that the performance of the micro-mechanical gyroscope has a strong anti-interference ability against unpredictable changes caused by various environmental factors and processing errors, so that Improving the reliability and stability of micromachined gyroscopes

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