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Detecting and early-warning system for liquid and liquid level and method

An early warning system, liquid technology, applied in liquid/fluid solid measurement, measuring device, liquid level indicator, etc. Reduce residual liquid, save manufacturing cost, and avoid the effect of pipeline emptying

Inactive Publication Date: 2009-02-11
POWERCHIP SEMICON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this way, similarly, there will be a large amount of residual photoresist and a waste of photoresist.

Method used

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  • Detecting and early-warning system for liquid and liquid level and method
  • Detecting and early-warning system for liquid and liquid level and method

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Embodiment Construction

[0039] In the liquid and liquid level detection and early warning system of the present invention, at least one liquid level sensor in the cylinder is additionally configured, so as to avoid the known pipe spraying, the inability to precisely control the amount of photoresist and The remaining amount and the bubbles contained in the photoresist.

[0040] Hereinafter, examples are given to illustrate the liquid and liquid level detection and early warning system of the present invention. In the following embodiments, the application of the liquid and liquid level detection and early warning system of the present invention to the photoresist coating process equipment is taken as an example for illustration, but it is not limited to this. Of course, the liquid and liquid level detection and early warning system of the present invention can be used in high-tech industries such as semiconductor factories and optical power plants, and can also be applied to other appropriate fields, suc...

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Abstract

The invention discloses a liquid / liquid-level detection / early-warning system and a liquid / liquid-level detection / early-warning method. The liquid / liquid-level detection / early-warning system is arranged in a liquid transportation device. Inside the liquid transportation device, a liquid steel cylinder for accommodating a liquid tank, a liquid temporary-storage cylinder and a discharge device are connected in sequence via a pipeline. The liquid / liquid-level detection / early-warning system comprises at least one pipeline-inside liquid sensor and at least one steel cylinder-inside liquid level sensor, wherein the pipeline-inside liquid sensor is arranged between the liquid temporary-storage cylinder and the discharge device, and the steel cylinder-inside liquid level sensor is arranged on the lateral wall of the liquid steel cylinder. The steel cylinder-inside liquid level sensor is provided with a detector for detecting whether the liquid level of the liquid tank inside the liquid steel cylinder reaches a detecting position.

Description

Technical field [0001] The invention relates to a liquid conveying device and a use method, and more particularly to a liquid and liquid level detection and early warning system and method. Background technique [0002] In the semiconductor process, various liquids are often used for different processes. For example, photoresist (PR) is used in the photolithography process, and in the photoresist coating process (coating process), the photoresist The resist is sprayed on the wafer. [0003] Generally speaking, the photoresist delivery device used in the photoresist coating machine includes a steel bottle, a photoresist bottle, a temporary storage cylinder and a nozzle. Moreover, the components in the photoresist conveying device may be connected via the same pipe. Among them, the steel bottle is used to contain the photoresist bottle (PR tank), and the photoresist is contained in the photoresist bottle. A nozzle is installed on the steel bottle, and the photoresist can be sprayed...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/16G01F23/00
Inventor 杨盛华梁家逢张永坪
Owner POWERCHIP SEMICON CORP
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