Apparatus for automatically detecting fusion jointing state of crystal and fusion silicon liquid level in vertical pulling type single crystal furnace

An automatic detection device and single crystal furnace technology, applied in the direction of crystal growth, single crystal growth, self-melting liquid pulling method, etc., can solve the problems of full melting of seed crystal, increased labor intensity, hidden danger of accidents, melting of seed crystal chuck, etc. , to achieve the effect of preventing melting accidents, reducing labor intensity and improving the degree of automation
CN101407937AInactive Publication Date: 2009-04-15ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
Publication Date
2009-04-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a straight pulling type single crystal production technology, aiming at providing an automatic detecting device for the fusion state of the single crystal and a silica fused liquid surface in a straight pulling type single crystal furnace. The device comprise a pulley, a sector conductor, a cable rope pipe externally coated with insulation materials, a steel cable, a metal seedholder, a quartz crucible, a graphite crucible, and a crucible push-off pin and the sector conductor of conductive materials; wherein, the steel cable, the pulley, a furnace body and a detecting warning circuit form a loop. The device can automatically detect the fusion state of the crystal and the liquid surface, and judge the fusion time; avoid the fusion accidents of the seedholder resulted from seedholder over-descending due to human behaviors; can monitor the fusion state of the crystal and the liquid surface in real time during the whole process, and warn the separation of the liquid surface in time; reduce labor intensity, improve the automation degree of the straight pulling type single crystal furnace and provide key techniques for the full automatic design of the single crystal furnace.
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Description

technical field

[0001] The invention relates to a Czochralski single crystal production technology, in particular to an automatic detection device for the welding state of crystal and molten silicon liquid surface in a Czochralski single crystal furnace. Background technique

[0002] In the production process of Czochralski monocrystalline silicon, it needs to go through many process steps from polycrystalline silicon material to pulling out monocrystalline silicon rods. It is necessary to monitor the state of the fusion between the crystal and the molten silicon surface. The seeding process is a growth process of fine grains. Before the seeding starts, the seed rod needs to be slowly inserted into the molten silicon liquid surface. When the liquid surface temperature reaches the requirements of fine grain growth, the liquid surface temperature and the increase of the seed crystal can be controlled. speed to achieve fine grain growth. During the descent of the seed crystal...

Claims

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