Automatic control silicon chip check system
A technology for inspection systems and silicon wafers, used in semiconductor/solid-state device manufacturing, electrical components, semiconductor/solid-state device testing/measurement, etc. Less, reduce mechanical friction, reduce the effect of secondary pollution
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[0030] The present invention will be described in detail below with reference to the drawings and embodiments.
[0031] Such as figure 1 As shown, the present invention includes an operating table 1, on which is provided a manipulator 2 for taking and sending silicon wafers, a silicon wafer box platform 3 capable of tilting and swinging, and a silicon wafer surface inspection capable of performing spherical motion. Mechanism 4, a fast-positioning stage 5, a lens group 6 is arranged above the stage 5, in addition, there is a computer control system 7 connected to the above-mentioned devices. These parts of the present invention have independent operability, that is to say, these parts can be applied to the present invention in combination, or they can be applied to other devices alone. Therefore, when a certain part involved in the present invention is applied to other occasions, It should not be excluded from the protection scope of the present invention. Each part of the present...
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