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Dewatering process of fluorine hydride

A technology of hydrogen fluoride and dehydrating agent, applied in fluorine/hydrogen fluoride and other directions, can solve problems such as cost increase, difficult control, complicated operation, etc., and achieve the effect of improving utilization rate and reducing processing cost

Inactive Publication Date: 2009-05-06
袁翔云
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The use of elemental fluorine is a very effective method to reduce various redox impurities and moisture content, but the direct use of elemental fluorine is often difficult to control due to its strong chemical activity, which puts high requirements on equipment and increases the cost , the operation becomes complicated

Method used

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  • Dewatering process of fluorine hydride

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Such as figure 1 As shown, firstly, under the protection of nitrogen, put 20-30 mesh solid cobalt trifluoride particles into the dehydrating agent container 2, add 50 liters of hydrogen fluoride with a water content of 100 ppm into the hydrogen fluoride container 4, then open the circulation valve 7 and pump Vacuum valve 1 starts the circulation pump 5, the pressure of the control system is lower than the safe design pressure, the linear velocity of hydrogen fluoride liquid flowing in the dehydrating agent container 2 is 0.5 m / s, and the gaseous fluoride generated in this process passes through the vacuum valve 1 Discharge, after 3 hours, take a sample to measure the water content of 50ppm, after 5 hours, 10 hours, and 15 hours, take a sample to detect respectively, the water content is respectively 42ppm, 12ppm, 5ppm, and the sampling inspection can be carried out by the analyzer 6.

[0021] The dehydrating agent CoF used in this embodiment 3 After running for a perio...

Embodiment 2

[0023] Such as figure 1 As shown, first put 20-30 mesh solid manganese tetrafluoride (MnF 4 ) particles, add 35 liters of hydrogen fluoride with a water content of 150ppm in the hydrogen fluoride container 4, then open the circulation valve 7, start the circulation pump 5, the pressure of the control system is lower than the safety design pressure, and the hydrogen fluoride liquid flows in the dehydrating agent container 2. The speed is 0.5 m / s. The gaseous fluoride generated during this process is discharged through the vacuum valve 1. After 3 hours, the water content is 80ppm, and after 5.5 hours, 8 hours, and 15 hours, the water content is 45ppm. , 15ppm, 7.5ppm, the sampling test can be carried out by the analyzer 6.

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Abstract

The invention discloses a dehydration method used for hydrogen fluoride. Metal fluoride which can react with water is used as a dehydrating agent so as to lead the hydrogen fluoride to contact with the dehydrating agent and convert the water in the hydrogen fluoride into vapor-phase fluoride which is discharged into the air, thus finally gaining the hydrogen fluoride meeting the requirement. The method has the advantages that the water content of disposed hydrogen fluoride is less than 10ppm; the fluoride after reaction can be circularly used by regeneration, the method improves the utilization ratio and reduces the disposal expense.

Description

technical field [0001] The present invention relates to a method for dehydrating hydrogen fluoride. Background technique [0002] Hydrogen fluoride is widely used in industry due to its unique physical and chemical properties, such as glass etching, etching of large-scale integrated circuits in the semiconductor industry, organic fluorinated synthesis reagents, and non-aqueous solvent chemical synthesis media, etc. . Hydrogen fluoride often contains various impurities that affect its application, so it needs to be handled properly. The use of elemental fluorine is a very effective method to reduce various redox impurities and moisture content, but the direct use of elemental fluorine is often difficult to control due to its strong chemical activity, which puts high requirements on equipment and increases the cost , the operation becomes complicated. In some cases, it is necessary to strictly control the moisture content in anhydrous hydrogen fluoride. For example, in some...

Claims

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Application Information

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IPC IPC(8): C01B7/19
Inventor 袁翔云
Owner 袁翔云
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