TFT-LCD array substrate structure and manufacturing method thereof

Abstract

The invention relates to a TFT-LCD array baseplate structure and a manufacturing method thereof. The array baseplate structure comprises a baseplate, at least one grid scanning line, a grid insulating layer, a data electrode, a first semiconductor doped layer, a semiconductor layer, a second semiconductor doped layer and a pixel electrode in order that the semiconductor layer in vertical direction between the pixel electrode and the data electrode forms a conduction channel in vertical direction. The manufacturing method comprises the following steps: at least one grid scanning line is formed on the baseplate; the grid insulating layer is formed; the data electrode is formed; and the first semiconductor doped layer, the semiconductor layer, the second semiconductor doped layer and the pixel electrode are sequentially formed in order that the semiconductor layer in vertical direction between the pixel electrode and the data electrode forms the conduction channel in vertical direction. The invention forms a vertical type TFT structure, shortens the length of the conduction channel so as to increase switch current, increases the brightness and the response speed of the TFT-LCD and improves the display performance of the TFT-LCD.

Description

technical field [0001] The invention relates to a thin film transistor liquid crystal display, in particular to a thin film transistor liquid crystal display array substrate structure and a manufacturing method thereof. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics of small size, low power consumption and no radiation, and occupies a dominant position in the current flat panel display market. For TFT-LCD, the structure of the array substrate and the manufacturing process determine its product performance. It can be seen that in order to improve the performance of TFT-LCD, we must first start with the structure of the array substrate. [0003] Figure 18 It is a schematic diagram of the structure of the TFT-LCD array substrate in the prior art, which is manufactured by the current mainstream 5 mask (5mask) or 4 mask (4mask) process. The prior art TFT-LCD array substrate structure mainly includes a substr...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a TFT-LCD array substrate structure and its manufacturing method, which can effectively solve the technical defects of the existing array substrate structure, such as large conductive channel length and low turn-on current.

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