On-line checking method of quality and flow controller
A technology of mass flow and calibration method, applied in the field of microelectronics, can solve the problems of reduced use efficiency and long time consumption of plasma processing equipment, and achieve the effect of shortening detection time and improving use efficiency
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[0036] The core of the present invention is to provide an online verification method of a mass flow controller, and the verification process consumes less time.
[0037] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0038] Please refer to figure 2 , figure 2 It is a flowchart of an online verification method of a mass flow controller provided in the first specific implementation of the present invention.
[0039] In the first specific implementation, the online verification method of a mass flow controller provided by the present invention includes the following steps:
[0040] Step S11:
[0041] Vacuum the reaction chamber 12 through the vacuum pump set 19 or other vacuum obtaining devices, and keep the pumping speed constant; at the same time, fix the position of the pressure control val...
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