Alumina coating correlation technique with alpha type crystal structure
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- KOBE STEEL LTD
- Publication Date
- 2009-06-03
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
[0001] This application is PCT application number PCT / JP2003 / 010114 (the application number of which entered the national stage is 03818927.5), the application date is August 8, 2003, and the invention name is "α-type crystal structure as the main body of the aluminum oxide film manufacturing method , Al2O3 film with α-type crystal structure as the main body, laminated film containing the film, component coated with the film or laminated film, its manufacturing method, and physical vapor deposition device” is a divisional application of the invention patent application. technical field
[0002] The present invention relates to a method for producing an alumina film mainly composed of an α-type crystal structure, an alumina film mainly composed of an α-type crystal structure, a laminated film containing an alumina film, and a member coated with an alumina film or a laminated film It also relates to a physical vapor deposition device used in the above manufacturing.
[0003] Spe...