Multifunction measuring set based on laser micro-interference

Abstract

The invention discloses a laser micro-interference multifunctional measuring device which consists of a displacement measuring device following the laser micro-interference principle, a contact pin displacement measuring device and a photoelectric receiver. Light emitted by a semi-conductor laser passes through a lens, an aperture stop and a field stop, and then is changed into a beam of parallel light after passing through a lens again; the parallel light is divided into two light beams by a dispersion prism, wherein, one light beam is cast by a micro-objective to a reference mirror, and the other light beam is cast by a different micro-objective to a tested surface or a reflection component contacted with a displacement measuring head; and the reflected reference light beam meets a tested light beam on a light division surface of the dispersion prism so as to generate interference fringes. The interference fringes are received by the photoelectric receiver. The invention has the advantages of high measuring accuracy, diversified measuring functions, simple structure, low cost, etc. The measuring head can carry out contact or non-contact measurement on the roughness of an ultraprecise surface as well as the geometrical shape, size, vibration, and the like of an MEMS component; the measurement range is 0-100 um, and the resolution can reach 0.02 nm. The laser micro-interference multifunctional measuring device can be provided with a nanometer probe to measure a nanometer shape.

Description

technical field [0001] The invention belongs to the technical field of measuring devices, and in particular relates to a multifunctional measuring device for contact / non-contact measurement of surface roughness, micro-displacement, micro-vibration, etc. based on laser micro-interference. Background technique [0002] Surface measurement can be roughly divided into contact measurement and non-contact measurement. Both contact measurement and non-contact measurement have their own advantages and disadvantages and application fields, so it is necessary to study contact and non-contact dual-purpose measuring heads. At present, the contact and non-contact dual-purpose measuring instruments for surface topography at home and abroad are basically composed of sensors with two different measurement principles. For example, Talyscan150 in the UK is a combination of inductive profiler and laser triangulation measuring instrument; the contact and non-contact dual-purpose system develope...

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Problems solved by technology

For example, Talyscan150 in the UK is a combination of inductive profiler and laser triangulation measuring instrument; the contact and non-contact dual-purpose system developed by Huazhong University of Science and Technology, [[1]Lu SF, Gao Y.S, Xie T.B.A novel contact / non-contact hybridmeasurement system for surface topography characterization.Int.J.MachineTools anufact.41, 2001, P2001-2009], the contact measurement uses the inductive sensor, and the non-contact measurement uses the improved Foucault knife-edge method; by the same measurement The main problem of the measurement system composed of sensors based on different principles is that the resource sharing degree is not high and the structure is complicated due to the combination of different measurement principles.

A contact and non-contact dual-purpose measurement system for surface topography based on white light interference developed by Huazhong University of Science and Technology [[2] Yun Jianping, Yang Xudong, Xie Tiebang. Acontact and non-contact hybrid profilometer with large range. Wuhan University Journal of Natural Sciences, 12(6), 2007, P1066-1072], contact and non-contact displacement measurement use the same set of white light interferometry system, but the system has complex structure, small range and slow speed

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