Dual-spindle surface shearing stress sensor

Abstract

The invention discloses a double shaft surface shear stress sensor, belonging to the micro electromechanical system technology field, which consists of an upper and a lower layer; the upper layer is a surface shear stress mechanical structure manufactured on a monocrystalline silicon chip; and the lower layer comprises signal leading wires manufactured on a glass substrate. the upper layer mechanical structure of the surface shear stress sensor comprises a fixed pedestal, an outside fixed comb electrode, an outside sensitive comb, an outside support beam, a bracing frame, an inside support beam, an inside fixed comb electrode, an inside fixed comb, an inside sensitive comb and a floating unit; the inside fixed comb and the inside sensitive comb are used for measuring the surface shear stress in horizontal direction; and the outside fixed comb and the outside sensitive comb are used for measuring the surface shear stress in vertical direction. Applying the invention can determine the direction of the surface shear stress in a plane, and measure the magnitude of surface shear stress.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS), in particular to a biaxial surface shear stress sensor. Background technique [0002] The measurement of surface shear stress is of great significance in basic scientific research, industrial control and biomedical applications. For example, under hypersonic conditions, accurately obtaining information on the magnitude of the frictional stress on the surface of the aircraft and the transition of the boundary layer will provide a reliable basis for the correct thermal protection design. [0003] Traditional macro-scale measurement techniques cannot meet the requirements of obtaining accurate surface shear stress data. The advantages of miniaturization of MEMS technology make the shear stress sensor based on MEMS technology have a sufficiently high spatial resolution, which has the potential to significantly improve the time and space measurement bandwidth, and meet ...

AI Technical Summary

Problems solved by technology

When applied to a fluid whose direction is unknown or whose direction will change, the sensor structure has great limitations and cannot simultaneously measure the magnitude of the surface shear stress and determine the direction of the fluid

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