Flexible MEMS resistance reducing covering and method of manufacturing the same

Abstract

The invention discloses a flexible MEMS resistance-reducing skin and a manufacturing method thereof used for reducing skin friction resistance during the advancing of on-water or underwater vehicles, which employs micro-fine resident bubbles to reduce resistance and belongs to the fields of micro-machinery and fluid dynamics. The upper surface of the skin is a surface layer coated with micro-pit arrays and processed by surface soakage; electrolytic anodes and cathodes of comb-shaped micro-fine planar metal, which are attached on an insulating layer, are arranged at the bottom of the micro-pits; a flexible substrate is positioned below the insulating layer; wire leading terminals for electrodes are arranged on the lower surface of the skin; and both the surface layer and the substrate are made by flexible materials. The overall thickness of the resistance reducing skin is at sub-millimeter level, and the skin is in the status of flexible film. The manufacturing method is an MEMS micro machining technique compatible with the flexible MEMS technology. The flexible MEMS resistance-reducing skin is coated on the outer surfaces of the on-water or underwater vehicles, with power thereof supplied by the on-water or under-water vehicles. Micro-bubbles stably residing in the micro-pits are formed by water electrolysis reaction to coat most parts of the surfaces of the on-water or under-water vehicles, thus realizing the function of reducing skin friction resistance.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanics and fluid dynamics, in particular to a flexible MEMS (Micro Electro-Mechanical System) drag-reducing skin and a manufacturing method thereof. Background technique [0002] The travel resistance encountered by water surface and underwater vehicles includes pressure difference resistance, eddy resistance and surface friction resistance, among which surface friction usually occupies the largest proportion. For vehicles with large length and aspect ratio or aspect ratio This is especially true. Therefore, it is of great significance to reduce its surface frictional resistance: under the condition of constant power, reducing the frictional resistance will effectively increase the speed and range of the vehicle; or conversely, under the premise of ensuring the speed and range, the volume of the power system can be reduced and weight, save space and payload, and improve the performance of other ...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problems of excessive power consumption, cavitation noise, and shortened voyage in the drag reduction method of introducing gas mentioned in the background technology, and to provide a flexible The MEMS drag-reducing skin is characterized in that the flexible MEMS drag-reducing skin is composed of a substrate 1, an insulating layer 2, a surface layer 3, metal electrodes and leads, etc., the upper surface of the skin is the surface layer 3, and the lower surface is the substrate 1, The surface layer 3 is a flexible material film made of flexible material, with holes formed on it to form an array of micro-pits 6, under the surface layer 3, at the bottom of each micro-pits 6, there are staggered fine planes including electrolysis anodes 4 and electrolysis cathodes 5 The comb-shaped electrode, the anode lead terminal 7 and the cathode lead terminal 8 are respectively connected to the electrolysis anode 4 and the electrolysis cathode 5 in each micro-pits 6 through internal connections, and the electrolysis electrodes, lead terminals and the internal connection between them They are all attached to the insulating layer 2. Below the insulating layer 2 is the substrate 1. The substrate 1 is a flexible material film made of a flexible material. At the positions corresponding to the anode lead terminal 7 and the cathode lead terminal 8, the substrate 1 and the insulating layer 2 is removed, the anode lead terminal 7 and the cathode lead terminal 8 are exposed on the lower surface of the skin, which are the welding parts for connecting external power supply wires

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