CoCrPt-based sputtering target and method for production thereof

A manufacturing method and technology of sputtering target, which are applied in the directions of sputtering coating, sputtering coating, record carrier manufacturing, etc., can solve the problem of not being able to fully improve the yield of platinum, and can suppress nodules and arc discharges. generation, excellent uniformity, and the effect of suppressing changes in the composition ratio of chromium
CN101495667AInactive Publication Date: 2009-07-29MITSUI MINING & SMELTING CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
MITSUI MINING & SMELTING CO LTD
Publication Date
2009-07-29
Estimated Expiration
Not applicable · inactive patent

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Abstract

Disclosed is a CoCrPt-based sputtering target which is reduced in the size and the quantity of a high-chromium particle having a high chromium atom content unevenly distributed in the sputtering target and therefore has increased target homogeneity, which is reduced in the formation of nodule or arcing, and which has a desired chemical composition. The CoCrPt-based sputtering target comprises cobalt, chromium, a ceramic material and platinum, wherein a high-chromium particle which has a high chromium atom content and is unevenly distributed in the sputtering target has a longest diameter of 40 [mu]m or less.
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Description

technical field

[0001] The invention relates to a CoCrPt-based sputtering target containing cobalt, chromium, ceramics and platinum and a manufacturing method thereof. Background technique

[0002] Conventionally, perpendicular magnetic recording media generally use a magnetic recording film capable of imparting high coercive force and low noise to the medium, and the magnetic recording film is obtained by dispersing an oxide in an alloy composed of cobalt-chromium-platinum. The magnetic recording film is produced by sputtering an alloy composed of cobalt-chromium-platinum using a CoCrPt-based sputtering target containing an oxide.

[0003] In recent years, there is a need for a magnetic recording film that further improves the coercive force and reduces media noise, so the crystal grains constituting the magnetic recording film are made finer and the non-magnetic phase such as oxide is dispersed. Research.

[0004] Among them, Patent Document 1 discloses a method for manu...

Claims

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