Ultrasonic spray tunnel furnace and method used for preparing large-area tin dioxide transparent conductive film
A technology of ultrasonic spray and tunnel furnace, applied in the direction of furnace, circuit, furnace type, etc., can solve the problems of high nozzle temperature, uneven film formation, difficult internal pressure control, etc., and achieve the effect of simple structure and reduced corrosion
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[0020] Example 1: Ultrasonic spray tunnel furnace
[0021] With reference to the drawings: an insulation layer 1 is provided outside the tunnel furnace. The tunnel furnace includes a heating zone 3, a working zone 4 and an annealing and heat preservation zone 5. The nozzle provided in the working area 4 is connected with the ultrasonic fogger 15. A heating tube 7 is provided in the spray tunnel furnace, a roller 8 is installed in the furnace, and a conveying mesh belt 2 is installed on the roller 8, and the substrate material 6 is placed on the conveying mesh belt 2 to be conveyed. The substrate material 6 is heated in the heating zone 3, deposited in the working zone 4, and annealed in the annealing and holding zone 5 to cool down. The temperature of heating, working area and annealing and holding area are all monitored by computer.
[0022] A nozzle insulation layer 9 is provided outside the nozzle, and a nozzle water cooling layer 10 is provided around the nozzle. The nozzle wa...
Example Embodiment
[0023] Example 2:
[0024] The method for preparing large-area transparent conductive film by ultrasonic spray method includes the following steps:
[0025] (1) Prepare a solution with a molar percentage of F / Sn of 1% to 10% according to the prior art; install an ultrasonic fogger connected with the nozzle to fog;
[0026] (2) The substrate material is carried by the conveyor mesh belt into the tunnel furnace and heated in the heating zone;
[0027] (3) The substrate material is conveyed into the work area by the conveying net, and the temperature is kept constant at 300℃~500℃. The nozzle sprays the fogged mist evenly on the substrate material, and the surface of the substrate material 6 will be transparent and conductive. Membrane, the exhaust gas after the reaction is drawn from the exhaust gas exhaust pipe by the air pump;
[0028] (4) The substrate material is sent from the conveyor belt to the annealing and heat preservation zone for annealing and cooling.
[0029] The equipm...
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