Method and device for preventing lens collision

Abstract

The invention provides a method and device for preventing collision of lenses. By judging the movement direction of the lenses, the movement sequence of the lenses is reasonably arranged, so as to achieve the effect of preventing the collision of the lenses. In addition, the device for preventing lens collision can also be protected by adding a detection module. The structure is simple and reliable, and does not require strict mechanical installation conditions, and there will be no misjudgment. There is no chance of damage to the movable mirror due to mishandling, and maintenance and repair costs can be reduced.

Description

technical field [0001] The invention relates to a device for preventing lens collision, in particular to a device for preventing lens collision in photolithography technology. Background technique [0002] The rapid development of modern semiconductor technology, in which optical lithography technology plays an important role. In the application of optical lithography technology in semiconductors, the designed circuit is made into a light-transmitting mask with a specific shape. Using the principle of exposure, the light source is projected onto the silicon wafer through the mask, and a specific pattern can be exposed and displayed. [0003] The lithography equipment has been able to form smaller and smaller patterns on the wafer, but in the lithography process, in order to meet the required process conditions, it is necessary to set the illumination mode. However, there is travel interference between the coaxial optical lenses used to set the lighting mode, that is, the mo...

AI Technical Summary

Problems solved by technology

However, there is an overlapping area between the strokes of the movable lens, so the movable lens will collide and cause damage

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