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Phase grating displacement sensor

A grating displacement and phase grating technology, applied in instruments, optical devices, measuring devices, etc., can solve the problems of difficult adjustment, low precision, instability, etc., and achieve the effects of good signal quality, strong received signal, and simple adjustment.

Inactive Publication Date: 2009-11-04
SHANGHAI LIANGXING ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The grating displacement sensor in the prior art has the following disadvantages: due to the small lamination gap of the grating, it is difficult to adjust; it is greatly affected by the deformation of the grating ruler; the signal quality is poor; it is difficult to meet the straightness requirement when measuring the displacement; Simple so low precision and unstable; no real-time error correction

Method used

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Effect test

Embodiment 1

[0022] The phase grating displacement sensor in this embodiment includes a grating pair and a photoelectric receiving element.

[0023] image 3 It is a schematic diagram of the principle of the grating of the phase grating displacement sensor.

[0024] Figure 4 It is the composition of the grating pair and the photoelectric replacement element in the phase grating displacement sensor.

[0025] Such as image 3 , Figure 4 The grating pair is a vernier principle grating pair, which is composed of a scale grating 2 and a reflective phase grating 3 . In the middle of the grating: the scale grating has 50 lines / mm; the reflective phase grating 3 has 49 lines / mm, and a special phase reflection film is coated on the surface of the grating. The lamination gap between the scale grating 2 and the reflective phase grating 3 is 0.03mm-0.05mm, and they are respectively fixed on the scale grating base 21 and the reflective phase grating base 31 . The scale grating seat 21 is connec...

Embodiment 2

[0028] The phase-type grating displacement sensor of this embodiment includes a grating pair, a photoelectric receiving element and a measuring rod movement system. On the basis of the first embodiment, a measuring rod moving system applying the principle of air damping is installed at the end of the measuring rod.

[0029] Figure 5 It is a cross-sectional view of the specific structure of the measuring rod movement system.

[0030] The measuring rod movement system applies the principle of air damping, including the gas cylinder 1, the piston 2 and the measuring rod 5, the measuring rod 5 and the piston 2 are sealed and connected through the joint connecting rod 4, and the piston 2 has an air chamber A and an air chamber B on the upper and lower sides; It also includes an air valve adjustment mechanism 3, which is composed of an air valve seat 31, a steel ball 32, an air hole M, and an air hole N. The air valve seat 31 is fixed in the air cylinder 1 above the air chamber A, ...

Embodiment 3

[0032] The phase grating displacement sensor of this embodiment includes a grating pair, a photoelectric receiving element and a high-magnification electronic subdivision encryption circuit. In this embodiment, on the basis of the technical solution in Embodiment 1, a high-magnification electronic subdivision encryption circuit is added; the four-phase signal output by the photoelectric receiving element is processed by the high-power electronic subdivision encryption circuit, and then converted into a representation displacement by the circuit Quantity figures are displayed.

[0033] Image 6 It is a working principle block diagram of the high-magnification electronic subdivision encryption circuit of the phase grating displacement sensor in this embodiment. The high-magnification electronic subdivision encryption circuit includes an operational amplifier circuit, a shaping circuit, an m subdivision circuit, and an n subdivision circuit. The four-phase signal output by the ...

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PUM

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Abstract

The invention relates to the field of precision instruments, in particular to a phase grating displacement sensor, which achieves displacement detection function by projecting Moire fringes formed by a scale grating and an indication grating to a field-shaped photoelectric receiving element, outputting four-phase signals with phase difference of 90 degrees and forming an ideal Lissajous circle. In order to improve performance, a high-power fine electronic division encrypting circuit also can be added to carry out high-power fine division for the four-phase signals so as to achieve the measurement resolution needed by a system; and a measuring bar can be provided with a measuring bar motion system applying the air damping principle to improve the stability and reliability. The applied displacement measuring system has the advantages of simple structure, convenient adjustment, strong capability of receiving signals, stability and high precision, and can correct error in real time.

Description

technical field [0001] The invention relates to the field of precision instruments and meters, in particular to a phase grating displacement sensor. Background technique [0002] According to the different length references used by the displacement sensor, the displacement sensor can be classified into: (1) The laser displacement sensor is formed by using the laser wavelength as a coherent light source. (2) Using glass or metal material as the carrier, the scale grating is composed of grid lines drawn at equal distances; the scale grating and the indicator grating are stacked together to form a grating pair; a certain gap and angle are maintained between the scale grating and the indicator grating , Moiré fringes are generated when the two have relative displacement, and then the signal representing the displacement is output and converted into a digital display, which is the grating displacement sensor. (3) Displacement sensors made of inductive synchronizers, capacitive g...

Claims

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Application Information

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IPC IPC(8): G01B11/02
Inventor 张俊刘锦兴
Owner SHANGHAI LIANGXING ELECTRONICS TECH
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