Portable all solid state dual wavelength laser cleaner

Abstract

The invention provides a portable all solid state dual wavelength laser cleaner, which comprises a system controller (1), a dual wavelength all solid state laser (2), a reflective optical system (3), a high speed micro-vibration mirror A (4), a high speed micro-vibration mirror B (5), a scanning field lens (6) and a temperature controller (7). A semiconductor end-pumped dual wavelength laser is used as a cleaning light source. The quality of beam of laser is good, the power density is high and the volume is small and semiconductor refrigeration is employed. The device can simultaneously output a 1064nm laser wavelength and a 532nm laser wavelength, guarantee good cleaning effect and wide application range, be convenient to carry and suitable for mobile cleaning, and can be used for effectively cleaning and removing the smudge on the surface of articles. Simultaneously, the device can also be used to clean the surfaces of optical elements, microelectronic devices, electronic circuit boards, silicon chips, dies and various devices and the like. When the device is used to clean nanoscale particles, the cleanliness is higher than 95 percent with the cleaning efficiency doubled.

Description

technical field [0001] The patent of the present invention relates to a portable all-solid-state dual-wavelength laser cleaning device. Background technique [0002] In the fields of industrial production, environmental protection, cultural relics protection and medical treatment, it is often necessary to clean dirt, such as grease, dust, rust on the surface of industrial products, or residual solvents, adhesives and other dirt that affect the assembled product The quality and stability of the mold; the residues accumulated in the mold patterns and grooves affect the surface shape of the product and reduce the yield; the residual organic film and dirt on the surface of the integrated circuit board will cause serious damage to the device; the rust on the surface of the metal product Traces, paints, etc. affect the appearance of the product; adsorption impurities, defects, and adsorption moisture remaining on the surface of the optical element substrate will cause increased ab...

AI Technical Summary

Problems solved by technology

[0007] In order to overcome the problems of poor cleaning effect caused by single laser wavelength cleaning, such as narrow range of suitable materials and selective cleaning of dirt, the present invention provides a portable all-solid-state dual-wavelength laser cleaning device

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