Novel real-time detection method and device of beam displacement drift and angle drift
A real-time detection and light beam technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of large space occupation, complex collimation device structure, slow feedback process, etc., to achieve convenient operation, low cost, and high detection accuracy Effect
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[0064] The whole detection system is composed of calibration parallel light, that is, incident laser 1, defocus grating 2, short-focus lens 3, image sensor 4 and computer 5, wherein defocus grating 2 and short-focus lens 3 are arranged in front and back, and image sensor 4 is located in this combination Afterwards, the computer 5 is located behind the image sensor 4 . The whole system works like figure 1 Shown:
[0065] Its specific working process is:
[0066] 1. The standard parallel optical calibration detection system with the same working wavelength is used, so that the image sensor is located at the focal plane of the lens, the positive and negative first-order light spots of the imaging are the same size, and the zero-order light spot is the smallest.
[0067] 2. Put the device in the optical path, and adjust the system so that the incident laser beam forms diffraction spots at various levels on the image sensor.
[0068] 4. Based on the method of image processing, ...
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