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Control method of mass spectrometer and spectrometer

A control method and mass spectrometer technology, which is applied in the control of mass spectrometers and in the field of mass spectrometers, can solve the problems of shortened filament life and increased power consumption, and achieve the effects of reducing power consumption and suppressing life shortening

Inactive Publication Date: 2013-01-30
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] However, in the method disclosed in Patent Document 1, since the filament current is continuously supplied to the filament, power consumption increases and the lifetime of the filament shortens.
Not limited to quadrupole analyzers, the same problem can also occur in mass spectrometers that have a structure that supplies current to the filament to eject electrons

Method used

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  • Control method of mass spectrometer and spectrometer
  • Control method of mass spectrometer and spectrometer
  • Control method of mass spectrometer and spectrometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0128] Figure 9 It represents the mass spectrometer 1 in this embodiment and the existing mass spectrometer (refer to Figure 8 ) is a graph of the power consumption when performing the specified operation. The vertical axis of the graph represents the magnitude of power consumption (W).

[0129] Figure 9 (1) shows the magnitude of power consumption in a state where partial pressure measurement is performed in the mass spectrometer 1 of the present embodiment and a conventional mass spectrometer. All the power supplies in the power supply circuit part 36 are +12V power supply 36a, ±12V power supply 36b, +5V power supply 36c, +200V / -100V power supply 36d and +90V power supply 36e (in the existing mass spectrometer, these power supplies are respectively The corresponding power supplies) are all in the on state. The power consumption at this time is about 25W. The mass spectrometer 1 of the present embodiment has no difference in power consumption when performing partial p...

Embodiment 2

[0134] Next, a comparative example of the above-mentioned embodiment will be described.

[0135] In this embodiment, instead of performing step 10 (the action of continuously measuring the maximum mass-to-charge ratio) of the above-mentioned embodiment, the mass-to-charge ratio is incremented by 1 each time from 1 to 100 to perform continuous measurement. Each measurement time is about 18 seconds, and the number of measurements is 100 times. At this time, it takes about 30 minutes for the temperature around the detection circuit to rise to about 37°C.

[0136] Compared with the case where the mass-to-charge ratio is set to the maximum mass-to-charge ratio, it takes about 25 minutes longer for the temperature around the detection circuit to rise to the same level as that in the above-mentioned embodiment. It can be seen that the mass-to-charge ratio in step 08 is preferably as large as possible, most preferably set to the maximum mass-to-charge ratio for measurement.

Embodiment 3

[0138] Next, a comparative example of the above-mentioned embodiment will be described.

[0139] Figure 10 and Figure 11 It is a graph showing the time change of the ion current value (A) when the partial pressure measurement is performed by the mass spectrometer having the configuration of the above-mentioned embodiment.

[0140] Figure 10 is a graph when the current is not supplied to the filament 41 during the measurement of the divided voltage is not performed. Figure 11 is a graph when a constant current of 1 A is supplied to the filament 41 during the measurement of the divided voltage is not performed. exist Figure 10 and Figure 11 , the vertical axis is the ion current value (A), and the horizontal axis is the time (minutes) after the start of partial pressure measurement. Ion current values ​​for various ions are shown in the figure. Such as Figure 10 and Figure 11 As shown, as a result of the partial pressure measurement, H 2 (thick solid line), H ...

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Abstract

A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

Description

technical field [0001] The invention relates to a control method of a mass spectrometer and the mass spectrometer. [0002] This application uses Japanese Patent Application No. 2007-106878 as a basic application, and incorporates the content thereof. Background technique [0003] As an analyzer for analyzing residual gas in a vacuum device, for example, a quadrupole mass spectrometer is known. A quadrupole mass spectrometer generally consists of an ion source, a filter unit, and a detection unit. The ion source is provided with a filament (cathode electrode) and a grid (anode electrode), and when a filament current is supplied to the filament, the filament is heated to eject thermal electrons to the grid. [0004] The filter section is equipped with four rod-shaped electrodes (four-layer electrodes) arranged between the ion source and the detection section. The four rod-shaped electrodes have a symmetrical and parallel arrangement in a grid shape, and are wired so that t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/62H01J41/04H01J49/26
CPCH01J49/0031H01J41/04H01J49/26G01N27/623
Inventor 中岛丰昭黑川裕次郎由利努田中领太猿渡治郎带施仁美
Owner ULVAC INC
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