Beam-film combined micro-pressure sensor

A technology of micro-pressure sensor and beam membrane, which is applied in the direction of fluid pressure measurement by changing the ohmic resistance, can solve the problems affecting the linearity of the sensor signal, and achieve the effects of optimizing the sensor output, improving the sensitivity, and improving the stiffness

Inactive Publication Date: 2010-03-17
XI AN JIAOTONG UNIV
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Problems solved by technology

This kind of beam-membrane structure makes the force of the pressure acting on the membrane be transmitted to the beam, but the d

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Embodiment Construction

[0016] The structural principle and working principle of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0017] refer to figure 1 , the present invention includes a base 4 configured with a cavity, the cavity of the base 4 communicates with the air inlet 9 on the base 4, and the circuit adapter board 1 is sequentially arranged in the cavity of the base 4, and the circuit transfer board 1 is arranged in sequence. The connecting plate 1 and the base 4 are firmly bonded by epoxy resin, and a (100) crystal surface full-silicon micro-press chip 5 is arranged in the cavity of the base 4, and the full-silicon micro-press chip 5 and the PYREX7740 glass ring 2 pass through Electrostatic bonding is sealed together, the hole 2 of the glass ring is aligned with the air inlet 9 and glued with epoxy resin, and the pressure soldering blocks 12, 13, 14, 15 and 16 on the all-silicon micro-press chip 5 are connected with the circuit The ...

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Abstract

The invention provides a beam-film combined micro-pressure sensor which comprises a base 4; a silicon micro-pressure chip 5 of a (100) crystal face is configured in the base 4; the front of a siliconsheet of the silicon micro-pressure chip 5 is corroded to form beams 11and 11' which are vertical to each other, and the back of the silicon sheet is corroded to form a flat film 10; the beam 11 and the beam 11', as well as beams around the silicon sheet form a beam shaped like a character tian so as to form a beam-film structure; pressure to be measured acts on the back of the back of the siliconsheet 5; a silicon membrane generates stress to cause the changes of resistors on the beams so as to measure a pressure value. The invention integrates the elasticity of a sensor, a sensitive elementand a conversion circuit and greatly reduces the sluggish and repeatability errors of the sensor in the process of measurement, thereby improving the measurement accuracy of the sensor. The inventioncan be widely used in oil logging, industrial automation, chain drive, national defense research and other fields.

Description

technical field [0001] The invention relates to a micro-pressure sensor, in particular to a beam-membrane combined micro-pressure sensor. Background technique [0002] At present, my country's petrochemical industry uses a large number of micro-pressure sensors. The vast majority of these sensors rely on imports, which are not only expensive, but also, because they do not have independent intellectual property rights, are likely to hide potential threats. The improvement of pressure sensor performance can promote breakthroughs through the improvement of pressure sensor structure, from flat membrane structure to island membrane structure to beam membrane structure, the improvement of these structures is aimed at improving the performance of the sensor, but each structure is different degree of pros and cons. The flat membrane structure is widely used and is suitable for medium and high range pressure sensors, such as tire pressure testing of automobile tires, oil pressure t...

Claims

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Application Information

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IPC IPC(8): G01L9/04
Inventor 蒋庄德田边赵玉龙廖南生
Owner XI AN JIAOTONG UNIV
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