Beam-film combined micro-pressure sensor

Abstract

The invention provides a beam-film combined micro-pressure sensor which comprises a base 4; a silicon micro-pressure chip 5 of a (100) crystal face is configured in the base 4; the front of a siliconsheet of the silicon micro-pressure chip 5 is corroded to form beams 11and 11' which are vertical to each other, and the back of the silicon sheet is corroded to form a flat film 10; the beam 11 and the beam 11', as well as beams around the silicon sheet form a beam shaped like a character tian so as to form a beam-film structure; pressure to be measured acts on the back of the back of the siliconsheet 5; a silicon membrane generates stress to cause the changes of resistors on the beams so as to measure a pressure value. The invention integrates the elasticity of a sensor, a sensitive elementand a conversion circuit and greatly reduces the sluggish and repeatability errors of the sensor in the process of measurement, thereby improving the measurement accuracy of the sensor. The inventioncan be widely used in oil logging, industrial automation, chain drive, national defense research and other fields.

Description

technical field [0001] The invention relates to a micro-pressure sensor, in particular to a beam-membrane combined micro-pressure sensor. Background technique [0002] At present, my country's petrochemical industry uses a large number of micro-pressure sensors. The vast majority of these sensors rely on imports, which are not only expensive, but also, because they do not have independent intellectual property rights, are likely to hide potential threats. The improvement of pressure sensor performance can promote breakthroughs through the improvement of pressure sensor structure, from flat membrane structure to island membrane structure to beam membrane structure, the improvement of these structures is aimed at improving the performance of the sensor, but each structure is different degree of pros and cons. The flat membrane structure is widely used and is suitable for medium and high range pressure sensors, such as tire pressure testing of automobile tires, oil pressure t...

AI Technical Summary

Problems solved by technology

This kind of beam-membrane structure makes the force of the pressure acting on the membrane be transmitted to the beam, but the deformation of the center of the diaphragm, that is, the maximum deflection, will affect the linearity of the sensor signal output

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