Method for preparing magnetic suspended coding micro-block array chips and method for applying the preparation method

Abstract

A method for preparing magnetic suspended coding micro-block array chips and a method for applying the preparation method, the preparation method is that firstly, selecting five same silicon sheets, and cleaning and drying the silicon sheets, secondly, coating PMMA glue, thirdly, hot padding, fourthly, utilizing an oxygen plasma body to carry out the reactive ion etching, adjusting the thickness of the glue to be 10-20 nm, fifthly, plating titanium 80-100 nm and gold 50-60 nm through vacuum evaporation, taking the titanium as a gluing and sacrificing layer, sixthly, plating nickel 10-15 nm as a gluing layer through vacuum evaporation, seventhly, plating copper 120-1250 nm through the vacuum evaporation, eighthly, evaporating nickel 30-50 nm through electronic beams, ninthly, plating gold 50-60 nm through vacuum evaporation, tenthly, stripping-off glue, and releasing suspended micro block array ships. The application method is that firstly, cleaning gold blocks, secondly, forming a monomolecular layer on the gold blocks through 11-mercapto carboxylic acid, thirdly, marking the gold blocks through biological macromolecule, fourthly, fluorescence detecting. Chips prepared by the invention have the characteristic of superparamagnetism, thereby conditions are created for biological decoration and biological magnet separation.

Description

technical field [0001] The invention relates to a suspension coding micro-block array chip. In particular, it relates to a preparation method and an application method capable of preparing a microblock array chip with magnetic suspension codes that can meet the miniaturization, parallelization and high-throughput quantification of biological immune detection. Background technique [0002] In recent years, indisputable progress and breakthroughs have been made in the fields of microelectromechanical systems (MEMS), integrated circuit (IC) technology, nanotechnology, molecular biology, and materials science. Combining these technologies to form a powerful system-on-chip, It has created a new breakthrough for biological detection, and biochips are just in line with this powerful system-on-chip. Biochip is a new technology that has emerged in the field of life science research in recent years. It uses micro-processing and microelectronics technology in the semiconductor industr...

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Problems solved by technology

But it also has many deficiencies: two different red fluorescein molecules are used to dye the microspheres in a certain ratio to achieve biological probe coding. This microsphere coding method is relatively difficult to control; the fluorescent signal of this organic dye is often very low Fast darkening (that is, photobleaching), that is, the fluorescence lifetime is short; the fluorescence of two dyes (two colors) needs two kinds of lasers to excite, resulting in expensive equipment, large volume, and time-consuming data processing; poor visual visibility during detection

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