Over-current protection device for physical vapor deposition heating system

Abstract

The invention relates to an over-current protection device for a physical vapor deposition heating system, which comprises an over-current detection circuit, an over-current protection control circuit and a working power circuit. The over-current detection circuit detects and processes the current of a heating power cord of the heating system through an induction coil and outputs a triggering signal; the over-current protection control circuit receives the triggering signal output by the over-current detection circuit and controls the on-off of a power supply of a current adjustment potentiometer of the heating system in a delay way; and the working power circuit supplies a working power supply to electricity utilization appliances in each circuit. The over-current protection device for the physical vapor deposition heating system has a delay triggering function, avoids the repeated fluctuations of the heating current in a heating process and reduces the damage of a heating element caused by the repeated shock of the current because load is easily influenced by membrane material granules to generate repeated changes.

Description

technical field [0001] The invention relates to an overcurrent protection device, in particular to an overcurrent protection device for a physical vapor deposition heating system. Background technique [0002] Vacuum coating technology belongs to vapor deposition technology, which is a method of depositing thin films by using the physical and chemical processes produced by various materials between the gas phase and between the gas phase and the basic surface of the solid. It can be divided into Physical Vapor Deposition (PVD for short), Chemical Vapor Deposition (CVD for short) and Physical-Chemical Vapor Deposition (PCVD for short). [0003] Physical vapor deposition can be divided into thermal evaporation deposition by heating the film, sputtering deposition by positive ion bombardment of the cathode (target) generated by gas discharge, ion plating combining evaporation and sputtering, and molecular beam epitaxy. . Vacuum evaporation coating is the earliest developed an...

AI Technical Summary

Problems solved by technology

When the film material moves to the substrate in the form of molecules or atoms, some film particles will also move into the furnace plate and attach to the surface of the furnace wire. In the long run, there will be contact between the furnace wire and the furnace plate, causing a short circuit. When the power of the heating power supply remains unchanged, the heating load becomes smaller and the heating current becomes larger, which causes current fluctuations.

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