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Surface acoustic wave correlator manufacturing method based on micro electro mechanical technology

A surface acoustic wave and correlator technology, applied in the direction of electrical components, impedance networks, etc., can solve problems affecting the propagation of surface acoustic waves, affecting the performance of correlators, reducing signal strength, etc., to improve processing capabilities, weaken reflections, reduce The effect of small energy loss

Active Publication Date: 2011-09-14
中科微光子科技成都有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the correlator made of surface acoustic wave devices has a big disadvantage that the two parallel interdigital transducers will generate reflection signals, which will generate new noise and affect the performance of the correlator. Therefore, it is necessary to use a new Design Techniques to Reduce Noise
In addition, the output electrode of the general surface acoustic wave correlator is to directly evaporate or sputter the metal electrode onto the piezoelectric crystal. Although this method is simple, it also affects the propagation of the surface acoustic wave, thereby reducing the signal strength. It is not conducive to the output of the signal, and it also needs to be improved in this respect

Method used

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  • Surface acoustic wave correlator manufacturing method based on micro electro mechanical technology
  • Surface acoustic wave correlator manufacturing method based on micro electro mechanical technology
  • Surface acoustic wave correlator manufacturing method based on micro electro mechanical technology

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Embodiment Construction

[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0030] Such as figure 1 as shown, figure 1 It is a flow chart of a method for manufacturing a surface acoustic wave correlator based on micro-electromechanical technology provided by the present invention, and the method includes:

[0031] Step 101: Fabricate two sets of interdigital transducers on a piezoelectric crystal substrate, the two sets of interdigital transducers are not parallel to each other and form a certain angle; the piezoelectric crystal substrate can be a quartz substrate, niobate Lithium substrate or bismuth germanate substrate, etc.

[0032] Step 102: making an air bridge between two sets of IDTs;

[0033] Step 103: Evaporate a metal film on the air bridge, lead out the metal electrodes, and complet...

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Abstract

The invention discloses a surface acoustic wave correlator manufacturing method based on a micro electro mechanical technology, comprising the following steps: manufacturing two groups of interdigital transducers on a piezocrystal substrate, wherein two groups of interdigital transducers are unparallel and form certain angle; manufacturing an air bridge between two groups of interdigital transducers; evaporating a metal film on the air bridge, and leading out a metal electrode. The surface acoustic wave correlator manufactured by the invention has the characteristics of small volume, simple manufacturing technology and quick reaction and is easy to integrate with an integrated circuit technology; the special design of the interdigital transducer greatly reduces noise disturbance.

Description

technical field [0001] The invention relates to the technical field of manufacturing signal processing devices, in particular to a method for manufacturing a surface acoustic wave correlator based on micro-electromechanical (MEMS) technology. Background technique [0002] Any electrical signal or acoustic signal can be described by the function of the variation of amplitude with time, which includes parameters such as frequency and phase of the signal. If there is a certain relationship between the frequency or phase changes of the two signals, the two signals are related signals, and a related output will be obtained; when the frequency or phase of the two signals has nothing to do with each other, a fixed related output cannot be obtained. Using related processing methods, it is possible to carry out confidential communication detection, and it is also possible to extract weak useful signals from strong interference noises. [0003] In order to realize the correlation pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H3/02
Inventor 李昊峰贾锐李维龙陈晨朱晨昕
Owner 中科微光子科技成都有限公司
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