Flyer structure for laser driving and preparation method thereof
A laser-driven, flyer technology, used in laser welding equipment, manufacturing tools, welding equipment, etc., can solve problems such as low absorption rate, reduce reflection, solve high reflection problems, and improve laser absorption.
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Embodiment 1
[0027] like figure 1 As shown, according to an embodiment of the present invention, this embodiment discloses a flying sheet structure for laser driving, the structure includes a transparent substrate 1; a nano-aluminum array ablation layer 2 is set on the transparent substrate; An aluminum oxide heat-resistant layer 3 is filled on the aluminum array ablation layer; an aluminum flyer layer 4 is arranged on the aluminum oxide heat-resistant layer. Specifically, the material of the transparent base 1 can be K9 glass, transparent ceramic or transparent crystal. In this embodiment, a layer of metal aluminum is physically deposited on the surface of YAG transparent ceramic as a transparent substrate with a thickness of 1 μm. The metal aluminum is oxidized into porous alumina by anodic oxidation, and then the metal aluminum is electrodeposited in the holes, and the cylindrical nano-aluminum periodic array structure is obtained after the holes are filled. Alumina is filled in the g...
Embodiment 2
[0030] According to another embodiment of the present invention, this embodiment further discloses a method for preparing a laser-driven flyer structure, the method comprising the following steps:
[0031] Step 1. Physically deposit a layer of metal aluminum on the surface of the transparent substrate by means of anodic oxidation or electron beam etching.
[0032] Step 2. Oxidize metal aluminum into porous alumina, and then electrodeposit metal aluminum in the pores. After the holes are filled, a cylindrical nano-aluminum periodic array structure is obtained; make it produce surface plasmon resonance absorption effect with laser, reduce the metal aluminum to The reflection of laser light improves laser absorption.
[0033] Step 3, magnetron sputtering a layer of aluminum oxide heat-resistant layer on the surface of the cylindrical nano-aluminum periodic array structure.
[0034] Step 4. Deposit a metal aluminum flyer layer on the surface of the alumina heat-resistant layer by...
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