Impedance adjusting device and impedance matching system comprising same

A technology of impedance adjustment and impedance matching, which is applied in the direction of impedance network, electrical components, multi-terminal pair network, etc., can solve problems such as difficulty in matching network, and achieve the effect of avoiding power loss

Active Publication Date: 2010-06-16
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this impedance adjustment is: L-type, π-type and T-type networks are suitable for high-frequency bands, but for low frequencies (30kHz-300kHz)

Method used

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  • Impedance adjusting device and impedance matching system comprising same
  • Impedance adjusting device and impedance matching system comprising same
  • Impedance adjusting device and impedance matching system comprising same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] refer to image 3 , is a schematic diagram of a mid- and low-frequency impedance matching system described in Embodiment 1 of the present invention.

[0036] The system mainly includes medium and low frequency power supplies, an impedance adjustment device (dotted line in the figure) and a load. Wherein, the impedance adjusting device includes a transformer and a capacitor C, the input end of the transformer is connected to the medium and low frequency power supply, and the output end of the transformer is connected to the capacitor C. Wherein, the capacitor C may be a fixed capacitor or an adjustable capacitor.

[0037] The present invention does not limit the type of the transformer. In this embodiment, the transformer is an isolation transformer composed of primary and secondary. The primary of the isolation transformer is connected to the medium and low frequency power supply. The secondary of the isolation transformer is connected to the capacitor C and The above...

Embodiment 2

[0043] refer to Figure 4 , is a schematic diagram of a mid- and low-frequency impedance matching system described in Embodiment 2 of the present invention.

[0044] The system mainly includes medium and low frequency power supplies, an impedance adjustment device (dotted line in the figure) and a load. Wherein, the impedance adjusting device includes a transformer, a capacitor C and an inductor L, the input end of the transformer is connected to the medium and low frequency power supply, and the output end of the transformer is connected with the capacitor C and the inductor L.

[0045] The present invention does not limit the type of the transformer. In this embodiment, the transformer is an isolation transformer composed of a primary and a secondary. The primary of the isolation transformer is connected to the medium and low frequency power supply, and the secondary of the isolation transformer is connected to the inductance L first. It is then sequentially connected with ...

Embodiment 3

[0058] Embodiment 3 provides an impedance matching device with a transformer different from Embodiment 2.

[0059] refer to Figure 5 , is a schematic diagram of a mid- and low-frequency impedance matching system described in Embodiment 3 of the present invention.

[0060] The system mainly includes medium and low frequency power supplies, an impedance adjustment device (dotted line in the figure) and a load. Wherein, the impedance adjustment device includes an autotransformer, a capacitor C and an inductance L, the input end of the autotransformer is connected with the medium and low frequency power supply, the output end of the autotransformer is first connected with the inductance L, and then connected with the The capacitor C and the load are sequentially connected to form a path. Of course, the inductor L can be connected in parallel with the capacitor C and the load (such as Figure 5 shown), the inductor L can also be connected in series with the capacitor C and the ...

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PUM

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Abstract

The invention provides a medium/low-frequency impedance adjusting device and an impedance matching system comprising the same, which can ensure that the impedance of a load and the impedance adjusting device is conjugate and matched with the characteristic impedance of a power supply. The device comprises a transformer and a capacitor C1, wherein the transformer is orderly connected with the capacitor C1 and the load to form a circuit. The transformer (the ratio of the number of turns of a primary coil to the number of turns of a secondary coil) and a capacitance value of the capacitor C1 are adjusted, so that impedance matching between the impedance of the load and the impedance adjusting device and the characteristic impedance of the power supply can be realized to further load the power of the medium/low-frequency power supply to the load and avoids power loss.

Description

technical field [0001] The invention relates to the technical field of impedance matching, in particular to a mid- and low-frequency impedance adjustment device and an impedance matching system including the device. Background technique [0002] Impedance matching refers to a suitable matching method between the signal source or transmission line and the load. [0003] At present, plasma equipment is widely used in the manufacturing processes of semiconductors, solar cells, and flat panel displays, such as various thin deposition films, or plasma etching. There are many ways to generate plasma at present. The applied power is divided from the frequency band, usually including DC, radio frequency and microwave, and radio frequency is divided into: low frequency (30kHz-300kHz), intermediate frequency (300kHz-2MHz), high frequency (2MHz) -30MHz), UHF (30MHz-300MHz). [0004] In the semiconductor etching process, a high-frequency power supply is usually used as a power source....

Claims

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Application Information

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IPC IPC(8): H03H7/09
Inventor 韦刚
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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