Fully-decoupled vibrating micromechanical gyroscope

Abstract

The invention relates to a fully-decoupled vibrating micromechanical gyroscope, which belongs to the technical field of inertial sensors in micro-electromechanical systems. Elastic supporting beams of a driving mass block are fixed on a substrate through upright posts; the driving mass block has a pane shape of which four corners are connected with the upright posts through the elastic beams; a detection mass block is arranged in the driving mass block and is connected with the driving mass block through the elastic supporting beams; fixed electrodes of driving capacitors are fixed on the substrate, while movable electrodes are fixed relative to the driving mass block and are opposite to the fixed electrodes of the driving mass block; and the fixed electrodes of detection capacitors are fixed on the substrate of the micromechanical gyroscope, while the movable electrodes are fixed on an insulating layer on the lower surface of the detection mass block and are conducted with the detection mass block through conductive posts. The micromechanical gyroscope of the invention completely eliminates the inference of vibration in a driving direction on the detection capacitors in terms of structural design, so the sensitivity of the micromechanical gyroscope is improved; and process difficulty and production cost are not increased and the micromechanical gyroscope is easy to produce inbatches.

Description

technical field [0001] The invention relates to a full-decoupling vibrating micro-mechanical gyroscope, which belongs to the technical field of inertial sensors in micro-electromechanical systems (MEMS). Background technique [0002] The gyroscope mainly uses the Coriolis force generated by the Coriolis effect to measure the angular motion parameters of the moving object relative to the inertial space. It can be widely used in the measurement and control of the motion state of the object in the fields of civilian products and defense products. Traditional gyroscopes are limited by factors such as volume, weight, power consumption, and cost, making it difficult to popularize and apply them in the civilian field. The micromechanical gyroscope made on the basis of integrated circuit (IC) technology and precision machining technology has outstanding advantages such as small size, light weight, low cost, and high reliability, so it can be used in automobile motion state control s...

AI Technical Summary

Problems solved by technology

figure 1 When the micromechanical gyroscope shown is subjected to the electrostatic force in the x direction, the driving mass 3 drives the detection mass 8 to vibrate along the x-axis direction at the same time, so that the relative area between the movable electrode and the fixed electrode of the detection capacitor changes, resulting in a change in the detection capacitance The differential capacitance also changes accordingly, which brings serious interference to the detection of the vibration signal in the y direction, reduces the performance of the vibrating micro-mechanical gyroscope, and makes it difficult to achieve high-precision angular velocity measurement

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