Method for detecting adhesion between spatial heterodyne interferometer gratings
A technology of spatial heterodyne and detection method, applied in the field of optical instruments, can solve the problem that the inclination angle of the two-arm grating is difficult to accurately control, and achieve the effects of convenient adjustment and calibration of optical path, reduction of interpretation error and improvement of accuracy.
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[0039] A glue detection method for a spatial heterodyne interferometer grating, such as figure 1 As shown, the gratings 40A and 40B at the two arm ends of the spatial heterodyne interferometer 4 to be glued are placed on a transparent platform 40C, the optical axis of the grating 40A at one arm end of the spatial heterodyne interferometer 4 is in the horizontal direction, and the other arm end The optical axis of the grating 40B is the vertical direction, the transparent platform 40C is an L-shaped platform, and the optical axis of the spatial heterodyne interferometer is the grating 40A at the end of the arm of the horizontal direction. The grating 40B at the end of the arm in the straight direction leans against the side wall of the L-shaped transparent platform. The inclination angle of the grating at the two ends of the spatial heterodyne interferometer is adjustable. It is equipped with a laser 1, an integrating sphere 2, and a collimation system 3. The laser 1 is aligned ...
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