Plasma generating device

Abstract

The invention discloses a plasma generating device, which comprises a shell (12), a Helmholtz coil (11), a negative pole (9), and a positive pole (10); the interior of the shell (12) is a vacuum cavity; the Helmholtz coil (11) is arranged coaxial with the shell (12); the negative pole (9) is positioned in the shell (12); the positive pole (10) is positioned in the shell (12) and opposite to the negative pole (9); the negative pole (9) is of a hollow metal tube structure with an opening along the axial direction, the opening direction is opposite to the positive pole (10), and the negative pole (9) and the positive pole (10) are arranged parallelly. In the invention, high density and large area plasma plate is generated by adopting magnetic confinement linear hollow negative pole dischargemode, thus having enhancing plasma density by hollow negative pole, and forming the uniform plasma plate (13) with density being over 10<12>cm<-3>, geometric size being over 60cm*60cm and thickness kept around 2cm. The high density and large area plasma has enormous advantage in aspects such as material surface treatment, research on interaction between plasma and electromagnetic wave, etc.

Description

technical field [0001] The invention relates to the field of plasma, in particular to a plasma generating device. Background technique [0002] Plasma technology has been applied in many fields such as materials, electronics, environmental protection, medicine, military, etc., many of which require large-scale, high-density plasma. Therefore, how to improve these parameters is the focus of research on plasma generation technology. [0003] DC discharge is the earliest and simplest way to generate plasma. Such as figure 1 , the electrode 2 is the cathode, and the electrode 3 is the anode, both of which are located in the vacuum cavity 4 . Applying a certain DC voltage under certain vacuum conditions will accelerate the charged particles randomly appearing in the gas to obtain energy. The accelerated charged particles collide with neutral gas molecules to ionize the gas molecules to generate more charged particles. The new charged particles will gain energy under the actio...

AI Technical Summary

Problems solved by technology

Therefore, most of the high-density plasma it generates is only inside the hollow cathode and cannot exist in a large area outside, which is not suitable for surface modification of materials.

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