Laser probe micro-area component analyzer based on double laser light source

A laser probe and component analysis technology, which is applied in material excitation analysis, instrumentation, optics, etc., can solve problems affecting the selectivity and reliability of element detection, detection error, and pulse laser inability, etc.

Active Publication Date: 2010-07-21
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

However, this laser probe micro-area composition analyzer still has the following shortcomings: first, the use of a single pulse laser cannot sufficiently resonate the plasma, that is, its secondary excitation effect on the plasma is not ideal; second, the use of The pulsed laser cannot completely and effectively suppress and exclude the interference of other element...

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  • Laser probe micro-area component analyzer based on double laser light source
  • Laser probe micro-area component analyzer based on double laser light source
  • Laser probe micro-area component analyzer based on double laser light source

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Embodiment Construction

[0027] Such as figure 1 , 2 Shown, the structure of laser probe micro-area component analyzer of the present invention is:

[0028] The light outlet of the fixed-wavelength laser 1, the attenuator 34, the beam expander 2, the aperture stop 35, and the first half-mirror 3 are successively located on the same horizontal optical path, and the transmission surface of the first half-mirror 3 and the The included angle of the substrate 9 is 45 degrees, and also forms an angle of 45 degrees with the horizontal optical path. The total reflection mirror 7 is movably installed, and is parallel to the first half mirror 3 when it is located on the optical path. The second half mirror 13 and the focusing objective lens 17 are sequentially located on the reflection optical path of the first total reflection mirror 7 .

[0029] The wavelength tunable laser 32 is located above the fixed-wavelength laser 1 , and a second total reflection mirror 33 is placed on its outgoing optical path, and...

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Abstract

The invention belongs to the technical field of laser probing, in particular to a laser probe micro-area component analyzer based on a double laser light source. The laser probe micro-area component analyzer comprises a fixed wavelength laser device, an attenuator, a beam expanding mirror and an aperture diaphragm; first semi-permeable half-mirrors are arranged on the same horizontal light path according to the structure; after a wavelength tunable laser device is reflected onto the first semi-permeable half-mirrors by a second totally reflecting mirror, the wavelength tunable laser device has the same light path with the laser beam of the fixed wavelength laser device; the fixed wavelength laser device and the wavelength tunable laser device can be arranged up and down or in parallel, and the starting sequence and the time delay thereof can be controlled by a digital delay generator; a fibre-optical probe receives laser, then the laser is transmitted to a grating spectrometer by the optical fibre, and the acquisition time of a plasma spectra reaching enhancement mode CCD is controlled by the digital delay generator. The laser probe machine stimulated by the double laser light sources has low detection limit, high element analysis precision and favourable element selectivity, is reliable and safe, and can be used for accurately determining the nature of microelements and trace elements of the micro-areas of various substances as well as carrying out accurate quantitative analysis.

Description

technical field [0001] The invention relates to a laser probe micro-area component analyzer using double laser light sources, which is mainly used for qualitative and precise quantitative analysis of material micro-area element components. Background technique [0002] Laser Induced Breakdown Spectroscopy (LIBS for short) technology is a new type of atomic spectrum analysis technology, which emits a spectrum by focusing a pulsed laser beam on the surface of a material to ablate it to form a plasma. Spectra to analyze the composition and content of its elements. Because of its unique multi-element synchronous real-time analysis capability, simple sample pretreatment requirements, and especially the ability to realize remote detection in the field, real-time online and high-risk environments, this technology has received great attention and has been accepted as soon as it appeared. Widely used in qualitative and quantitative analysis of various objects. At present, LIBS tech...

Claims

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Application Information

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IPC IPC(8): G01N21/63G02B7/182
Inventor 曾晓雁陆永枫郭连波李常茂蔡志祥曹宇
Owner HUAZHONG UNIV OF SCI & TECH
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