Stray light correction method of spectrograph

Abstract

The invention discloses a method and a device for correcting stray light of a spectrograph. A plurality of color filters capable of being cut in are arranged on a light path between a light signal entering slit and a color dispersion element of the spectrograph, the same light source to be measured is respectively measured when each color filter is cut in and when light filters are not cut in, stray light distributing factors are calculated by the measured spectrum, the stray light error of the light source to be measured or other light sources is corrected and measured by using the stray light distributing factors, and the color filters can also be combined with laser to further correct the stray light; or the color filters and the laser are combined to correct the stray light generated by light radiation outside the measuring waveband of the spectrograph, and the stray light in the measuring waveband of the spectrograph is corrected by using the laser; and the corresponding measurement and control software of the spectrograph comprises a stray light correction program capable of conveniently and rapidly realizing the correction of the stray light. The invention can realize the correction of the stray light in the measuring waveband of the spectrograph and the stray light caused by the light radiation outside the measuring waveband and has convenient operation and is easy to realize high-precision spectral measurement.

Description

【Technical field】 [0001] The invention belongs to the field of spectral radiation measurement, and in particular relates to a method for correcting stray light of a spectrometer. 【Background technique】 [0002] Spectrometers are used to measure the spectral power distribution of light radiation, and are widely used in color measurement, element identification, chemical analysis and other fields. Stray light is unavoidable in spectrometers due to imperfect diffraction from gratings, scattering caused by dust or defects on optical components, and various reflections inside the instrument. For a fast spectrometer with an array detector, stray light refers to other spectral components irradiated on the pixel corresponding to a specific wavelength point, which will bring considerable measurement errors. The level of stray light is one of the important technical indicators to measure the performance of the spectrometer. The stray light can be reduced to a reasonable level by car...

AI Technical Summary

Problems solved by technology

Although this method can greatly reduce stray light and improve measurement accuracy, there are still some problems. First, the manufacturing and maintenance costs of tunable lasers are extremely high, which is difficult for general spectrometer manufacturers and even metrology laboratories to afford; second, this method can only correct all In the measured spectrum, the stray light brought by the optical radiation in the measurement band of the spectrometer cannot be corrected for the stray light produced by the optical radiation outside the measurement band of the spectrometer at each wavelength in the measurement band of the spectrometer. The response wavelength range of the spectrometer is generally wider than the measurement band of the spectrometer. For example, for a spectrometer that measures visible light, the spectral response range of its detector is often in the ultraviolet-visible-infrared range, especially the stray light in the infrared part will bring more big error

Images