Self-adaptive damping variable ultra-precise vibration absorber

Abstract

The invention discloses a self-adaptive damping variable ultra-precise vibration absorber, which has the following structure: the exterior of a metal shell is in an upper end-opened cylinder shape; the metal shell is hollow, is divided into an upper hollow part and a lower hollow part by a clapboard, has an H-shaped section; a lower cavity is formed in the hollow part on the lower part; an upper cavity is formed by connecting the upper hollow part and a piston mechanism through a film structure in a sealed mode; an air inlet is formed at the bottom of the lower cavity; a communicating pipeline with a throttling valve is arranged between the lower cavity and the upper cavity; a load connecting plate is fixedly connected with the upper end face of the piston mechanism; an absolute velocity sensor is arranged on the load connecting plate; a non-contact eddy current proximity sensor is arranged on the upper end part of the metal shell; an active actuator is arranged between the metal shell and the load connecting plate; and the load connecting plate is used to be fixedly connected with load. The self-adaptive damping variable ultra-precise vibration absorber can well attenuate vertical vibration and perform on-line self-adaptation without off-line debugging, and can provide hyperstatic environment for a photoetching machine and other precision equipment.

Description

technical field [0001] The invention belongs to the technical field of precision damping, and in particular relates to an ultra-precise damper with adaptive variable damping characteristics. The ultra-precision shock absorber involved in the present invention has ultra-low resonance point vibration transmission rate and good high-frequency attenuation rate, and can be used as a basic support for ultra-precision equipment such as ultra-precision processing equipment, measuring instruments, and biological gene manipulation equipment. Background technique [0002] With the development of science and technology, ultra-precision manufacturing and measuring equipment represented by photolithography machines, high-resolution scanning tunneling microscopes, surface roughness measuring instruments, etc. approaching the physical limit. As one of the important guarantees for achieving ultimate precision, the ultra-precision vibration reduction system can isolate the influence of found...

AI Technical Summary

Problems solved by technology

However, due to the inherent relative damping of the air spring still exists, the ceiling damping cannot be fully realized, so that the high-frequency attenuation rate is still affected; at the same time, relying entirely on the motor to provide the damping force also puts forward relatively high requirements for the output range and frequency response characteristics of the motor. high requirements

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