Self-adaptive damping variable ultra-precise vibration absorber

An ultra-precision, shock absorber technology, applied in the direction of gas shock absorbers, etc., can solve the problems of inability to fully realize ceiling damping, high-frequency attenuation rate effects, etc., and achieve good attenuation, active adjustable damping, and low stiffness.

Active Publication Date: 2010-09-01
武汉微搏科技有限公司
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Problems solved by technology

However, due to the inherent relative damping of the air spring still exists, the ceiling damping cannot be fully realized, so that the high-frequency attenuation rate is still affected; at the same ti

Method used

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  • Self-adaptive damping variable ultra-precise vibration absorber
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  • Self-adaptive damping variable ultra-precise vibration absorber

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Embodiment Construction

[0018] The structure and working principle of the present invention are further described below in conjunction with design examples and accompanying drawings.

[0019] Such as figure 1 As shown, the precision shock absorber provided by the present invention structurally includes two parts, a passive damping component and an active actuator.

[0020] The passive damping part in the present invention is a double-chamber air spring, which includes a metal shell 1, an upper chamber 2, a lower chamber 3, a piston mechanism 6, a load connecting plate 7, a membrane structure, a throttle valve 8 and an inlet Air port 9. The metal shell 1 has an open cylindrical shape on the outside and a hollow inside, separated by a partition 10 into upper and lower hollow parts, and its section is H-shaped. The lower hollow space forms the lower chamber 3 , and the upper hollow space and the piston mechanism 6 are sealed and connected through a membrane structure to form the upper chamber 2 .

[...

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Abstract

The invention discloses a self-adaptive damping variable ultra-precise vibration absorber, which has the following structure: the exterior of a metal shell is in an upper end-opened cylinder shape; the metal shell is hollow, is divided into an upper hollow part and a lower hollow part by a clapboard, has an H-shaped section; a lower cavity is formed in the hollow part on the lower part; an upper cavity is formed by connecting the upper hollow part and a piston mechanism through a film structure in a sealed mode; an air inlet is formed at the bottom of the lower cavity; a communicating pipeline with a throttling valve is arranged between the lower cavity and the upper cavity; a load connecting plate is fixedly connected with the upper end face of the piston mechanism; an absolute velocity sensor is arranged on the load connecting plate; a non-contact eddy current proximity sensor is arranged on the upper end part of the metal shell; an active actuator is arranged between the metal shell and the load connecting plate; and the load connecting plate is used to be fixedly connected with load. The self-adaptive damping variable ultra-precise vibration absorber can well attenuate vertical vibration and perform on-line self-adaptation without off-line debugging, and can provide hyperstatic environment for a photoetching machine and other precision equipment.

Description

technical field [0001] The invention belongs to the technical field of precision damping, and in particular relates to an ultra-precise damper with adaptive variable damping characteristics. The ultra-precision shock absorber involved in the present invention has ultra-low resonance point vibration transmission rate and good high-frequency attenuation rate, and can be used as a basic support for ultra-precision equipment such as ultra-precision processing equipment, measuring instruments, and biological gene manipulation equipment. Background technique [0002] With the development of science and technology, ultra-precision manufacturing and measuring equipment represented by photolithography machines, high-resolution scanning tunneling microscopes, surface roughness measuring instruments, etc. approaching the physical limit. As one of the important guarantees for achieving ultimate precision, the ultra-precision vibration reduction system can isolate the influence of found...

Claims

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Application Information

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IPC IPC(8): F16F9/02
Inventor 陈学东蒲华燕罗欣曾理湛姜伟李一浩
Owner 武汉微搏科技有限公司
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