Method for separating base plate and semiconductor layer
A semiconductor and substrate technology, applied in the field of separating the substrate and the semiconductor layer, can solve the problems of poor quality, high lattice mismatch, affecting the luminous efficiency, etc., to achieve increased luminous efficiency, simple manufacturing process steps and reduced technical costs Effect
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[0061] The direction discussed in the present invention is a method of separating the substrate and the semiconductor layer. In order to thoroughly understand the present invention, detailed steps and their composition will be proposed in the following description. Obviously, the implementation of the present invention is not limited to the specific details well known to those skilled in the semiconductor optoelectronic manufacturing process. On the other hand, well-known components or steps are not described in details to avoid unnecessary limitation of the present invention. The preferred embodiments of the present invention will be described in detail as follows. However, in addition to these detailed descriptions, the present invention can also be widely implemented in other embodiments, and the scope of the present invention is not limited, and the scope of the claims shall prevail. .
[0062] An object of the present invention is to separate the substrate and the semicond...
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