Assembling target material for preparing composite material, manufacturing method thereof, repair method thereof and modification method thereof

A technology for composite materials and targets, which is applied to assembleable targets, the repair and modification of the above-mentioned assembleable targets, the preparation of assembleable targets of composite materials, and the manufacturing field of the above-mentioned assembleable targets, which can solve the problems of low efficiency, The problems of high film thickness of composite materials and restrictions on the large-scale application of composite materials have achieved the effect of reducing cost, reducing pollution and improving utilization rate.

Inactive Publication Date: 2010-11-24
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, during the physical deposition process, the consumption of materials in different regions on the target has a great relationship with the applied magnetic field (the magnetic field affects the distribution density of the energy beam), and often deep holes will be formed in some regions above the target. Grooves (for example, circular deep grooves are often formed above the circular target), when the depth of the groove reaches the top of the base, the expensive target will be scrapped. In summary, due to various reasons, the preparation of composite film The average price is very high and the efficiency is low, which limits the large-scale application of composite products to a certain extent.

Method used

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  • Assembling target material for preparing composite material, manufacturing method thereof, repair method thereof and modification method thereof
  • Assembling target material for preparing composite material, manufacturing method thereof, repair method thereof and modification method thereof
  • Assembling target material for preparing composite material, manufacturing method thereof, repair method thereof and modification method thereof

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Experimental program
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Effect test

Embodiment 1

[0029] see figure 1 , figure 1 A target structure for preparing functional materials is disclosed. figure 1 The base material shown in is not a base. From the structure, it can be seen that a groove is opened in the base material (or a groove structure is formed after splicing discrete pieces of base material), and the depth of the groove is less than or equal to the thickness of the base material. After the non-substrate material is filled, at least one non-substrate material is distributed in the groove, which is obtained by subsequent filling or inlaying. The shape, material, quantity and area are not limited, and can be adjusted according to different film requirements. As a preference, the groove-filling regions are evenly distributed on the assembled target, and the shape is fan-shaped, triangular or fan-shaped. figure 1 shows the situation that there are three kinds of non-substrate materials at the same time, using a fan-shaped structure. In the figure, the total are...

Embodiment 2

[0036] In this embodiment, the circular target and fan-shaped groove filling are still used as examples to illustrate the repair method of the composite material target, such as Figure 3A Shown is a composite material target material, four evenly distributed triangular areas are opened above the base target material 12 which is relatively difficult to consume, and the triangular areas are filled with target material 13 which is relatively easy to consume, as above As mentioned above, neither the shape nor the area of ​​the target material and the trench is a feature that limits the present invention.

[0037] The projection along the A-A direction in the target is as follows Figure 3B As shown, while the projection along the B-B direction is as Figure 3C As shown, it can be seen that the thickness of the filled target material 13 is smaller than the thickness of the base target material 12 , obviously, its thickness can also be equal to the thickness of the target material...

Embodiment 3

[0042] This embodiment, as shown in FIG. 4, illustrates a method in which the first material is used as the target substrate (not the base), the second material is used as the covering material, and there is a certain area of ​​hollowing above the covering of the second material. During the deposition process of the film, The first material and the second material are simultaneously deposited on the substrate and combined to form a composite material.

[0043] Manufacture the hollow structure 18 of W by machining, the material is the sheet 16 of W, have a plurality of hollow structures 17 above the sheet 16, the shape of the hollow structure can be any shape (not limited to) including the fan shape At Figure 4A shape shown). With Ti as the base target 20, Cu as the base 19, and the W hollow structure 18 placed above the Ti base, the resulting final structure is as follows Figure 4C As shown, during the use of the target, Ti and W are co-deposited on the substrate to form a...

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Abstract

The invention discloses an assembling target material for preparing a composite material, which is characterized by comprising a first material substrate, wherein a plurality of grooves are formed on the substrate; and at least one material different from the first material is filled in the grooves. The target material is manufactured by the following steps: forming a groove structure on the first material substrate target material; filling the powder or melt of the at least one material different from the first material; sintering; cooling; and flattening to obtain the target material. After part of the target material is wear, the worn part of the target material is repaired to realize the recycling of the target material, and thus, the utilization rate is improved. When the assembling target material is used, composite material films can be prepared conveniently, the preparation cost of the films can be reduced, and the utilization rate of the target material is improved.

Description

technical field [0001] The invention belongs to the technical field of thin film deposition, and relates to an assembleable target, in particular to an assembleable target for preparing composite materials; the invention also relates to a manufacturing method of the above-mentioned assembleable target; in addition, the invention further relates to The method for repairing and refitting the above-mentioned assembleable target. Background technique [0002] Composite material is a widely used material nowadays. It is composed of more than two kinds of materials. Compared with the uniform composition of alloy materials, the interior of composite materials is composed of obvious domains of various materials. This special structure has special Therefore, composite materials often combine the properties of multiple materials compounded in the material, and finally obtain stronger performance than a single material, which plays an important role in various fields. For example, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22C23C14/34B22F7/06
Inventor 张挺宋志棠刘波吴关平成岩封松林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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